7/25/2010	8:43:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2010	8:43:59 AM	Recipe started at 8:43 AM
7/25/2010	8:43:59 AM	H2 valve closed
7/25/2010	8:43:59 AM	BCl3 valve closed
7/25/2010	8:43:59 AM	PH3 valve closed
7/25/2010	8:43:59 AM	SiCl4 pre valve closed
7/25/2010	8:43:59 AM	SiCl4 post valve closed
7/25/2010	8:43:59 AM	Main Vac valve closed
7/25/2010	8:43:59 AM	Bypass valve closed
7/25/2010	8:43:59 AM	Bubbler valve closed
7/25/2010	8:43:59 AM	Helium valve opened
7/25/2010	8:43:59 AM	Helium MFC set to  500.000000
7/25/2010	8:43:59 AM	H2 MFC set to  0.000000
7/25/2010	8:43:59 AM	BCl3 MFC set to  0.000000
7/25/2010	8:43:59 AM	PHl3 MFC set to  0.000000
7/25/2010	8:43:59 AM	SiCl4 MFC set to  0.000000
7/25/2010	8:43:59 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	8:43:59 AM	Tube furnace set to 0
7/25/2010	8:45:19 AM	Helium valve closed
7/25/2010	8:45:19 AM	H2 valve closed
7/25/2010	8:45:19 AM	BCl3 valve closed
7/25/2010	8:45:19 AM	PH3 valve closed
7/25/2010	8:45:19 AM	SiCl4 pre valve closed
7/25/2010	8:45:19 AM	SiCl4 post valve closed
7/25/2010	8:45:19 AM	Main Vac valve closed
7/25/2010	8:45:19 AM	Bypass valve closed
7/25/2010	8:45:19 AM	Bubbler valve closed
7/25/2010	8:45:19 AM	Helium MFC set to  0.000000
7/25/2010	8:45:19 AM	H2 MFC set to  0.000000
7/25/2010	8:45:19 AM	BCl3 MFC set to  0.000000
7/25/2010	8:45:19 AM	PHl3 MFC set to  0.000000
7/25/2010	8:45:19 AM	SiCl4 MFC set to  0.000000
7/25/2010	8:45:19 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	8:45:19 AM	Tube furnace set to 0
7/25/2010	8:45:20 AM	Run finished at 8:45 AM
7/25/2010	8:45:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2010	8:58:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	8:58:45 AM	Recipe started at 8:58 AM
7/25/2010	8:58:45 AM	Helium valve closed
7/25/2010	8:58:45 AM	H2 valve closed
7/25/2010	8:58:45 AM	BCl3 valve closed
7/25/2010	8:58:45 AM	PH3 valve closed
7/25/2010	8:58:45 AM	SiCl4 pre valve closed
7/25/2010	8:58:45 AM	SiCl4 post valve closed
7/25/2010	8:58:45 AM	Main Vac valve closed
7/25/2010	8:58:45 AM	Bubbler valve closed
7/25/2010	8:58:45 AM	Bypass valve opened
7/25/2010	8:58:45 AM	Helium MFC set to  0.000000
7/25/2010	8:58:45 AM	H2 MFC set to  0.000000
7/25/2010	8:58:45 AM	BCl3 MFC set to  0.000000
7/25/2010	8:58:45 AM	PHl3 MFC set to  0.000000
7/25/2010	8:58:45 AM	SiCl4 MFC set to  0.000000
7/25/2010	8:58:45 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	8:58:45 AM	Tube furnace set to 0
7/25/2010	8:59:21 AM	Helium valve closed
7/25/2010	8:59:21 AM	H2 valve closed
7/25/2010	8:59:21 AM	BCl3 valve closed
7/25/2010	8:59:21 AM	PH3 valve closed
7/25/2010	8:59:21 AM	SiCl4 pre valve closed
7/25/2010	8:59:21 AM	SiCl4 post valve closed
7/25/2010	8:59:21 AM	Bubbler valve closed
7/25/2010	8:59:21 AM	Main Vac valve opened
7/25/2010	8:59:21 AM	Bypass valve opened
7/25/2010	8:59:21 AM	Helium MFC set to  0.000000
7/25/2010	8:59:21 AM	H2 MFC set to  0.000000
7/25/2010	8:59:21 AM	BCl3 MFC set to  0.000000
7/25/2010	8:59:21 AM	PHl3 MFC set to  0.000000
7/25/2010	8:59:21 AM	SiCl4 MFC set to  0.000000
7/25/2010	8:59:21 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	8:59:21 AM	Tube furnace set to 0
7/25/2010	8:59:21 AM	Run finished at 8:59 AM
7/25/2010	8:59:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	8:59:54 AM	Recipe started at 8:59 AM
7/25/2010	8:59:54 AM	Helium valve closed
7/25/2010	8:59:54 AM	H2 valve closed
7/25/2010	8:59:54 AM	BCl3 valve closed
7/25/2010	8:59:54 AM	PH3 valve closed
7/25/2010	8:59:54 AM	SiCl4 pre valve closed
7/25/2010	8:59:54 AM	SiCl4 post valve closed
7/25/2010	8:59:54 AM	Main Vac valve closed
7/25/2010	8:59:54 AM	Bubbler valve closed
7/25/2010	8:59:54 AM	Bypass valve opened
7/25/2010	8:59:54 AM	Helium MFC set to  0.000000
7/25/2010	8:59:54 AM	H2 MFC set to  0.000000
7/25/2010	8:59:54 AM	BCl3 MFC set to  0.000000
7/25/2010	8:59:54 AM	PHl3 MFC set to  0.000000
7/25/2010	8:59:54 AM	SiCl4 MFC set to  0.000000
7/25/2010	8:59:54 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	8:59:54 AM	Tube furnace set to 0
7/25/2010	8:59:54 AM	Helium valve closed
7/25/2010	8:59:54 AM	H2 valve closed
7/25/2010	8:59:54 AM	BCl3 valve closed
7/25/2010	8:59:54 AM	PH3 valve closed
7/25/2010	8:59:54 AM	SiCl4 pre valve closed
7/25/2010	8:59:54 AM	SiCl4 post valve closed
7/25/2010	8:59:54 AM	Bubbler valve closed
7/25/2010	8:59:54 AM	Main Vac valve opened
7/25/2010	8:59:54 AM	Bypass valve opened
7/25/2010	8:59:54 AM	Helium MFC set to  0.000000
7/25/2010	8:59:54 AM	H2 MFC set to  0.000000
7/25/2010	8:59:54 AM	BCl3 MFC set to  0.000000
7/25/2010	8:59:54 AM	PHl3 MFC set to  0.000000
7/25/2010	8:59:54 AM	SiCl4 MFC set to  0.000000
7/25/2010	8:59:54 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	8:59:54 AM	Tube furnace set to 0
7/25/2010	9:00:54 AM	H2 valve closed
7/25/2010	9:00:54 AM	BCl3 valve closed
7/25/2010	9:00:54 AM	PH3 valve closed
7/25/2010	9:00:54 AM	SiCl4 pre valve closed
7/25/2010	9:00:54 AM	SiCl4 post valve closed
7/25/2010	9:00:54 AM	Bubbler valve closed
7/25/2010	9:00:54 AM	Helium valve opened
7/25/2010	9:00:54 AM	Main Vac valve opened
7/25/2010	9:00:54 AM	Bypass valve opened
7/25/2010	9:00:54 AM	Helium MFC set to  100.000000
7/25/2010	9:00:54 AM	H2 MFC set to  0.000000
7/25/2010	9:00:54 AM	BCl3 MFC set to  0.000000
7/25/2010	9:00:54 AM	PHl3 MFC set to  0.000000
7/25/2010	9:00:54 AM	SiCl4 MFC set to  0.000000
7/25/2010	9:00:54 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:00:54 AM	Tube furnace set to 0
7/25/2010	9:09:54 AM	Helium valve closed
7/25/2010	9:09:54 AM	H2 valve closed
7/25/2010	9:09:54 AM	BCl3 valve closed
7/25/2010	9:09:54 AM	PH3 valve closed
7/25/2010	9:09:54 AM	SiCl4 pre valve closed
7/25/2010	9:09:54 AM	SiCl4 post valve closed
7/25/2010	9:09:54 AM	Bubbler valve closed
7/25/2010	9:09:54 AM	Main Vac valve opened
7/25/2010	9:09:54 AM	Bypass valve opened
7/25/2010	9:09:54 AM	Helium MFC set to  0.000000
7/25/2010	9:09:54 AM	H2 MFC set to  0.000000
7/25/2010	9:09:54 AM	BCl3 MFC set to  0.000000
7/25/2010	9:09:54 AM	PHl3 MFC set to  0.000000
7/25/2010	9:09:54 AM	SiCl4 MFC set to  0.000000
7/25/2010	9:09:54 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:09:55 AM	Tube furnace set to 0
7/25/2010	9:10:55 AM	H2 valve closed
7/25/2010	9:10:55 AM	BCl3 valve closed
7/25/2010	9:10:55 AM	PH3 valve closed
7/25/2010	9:10:55 AM	SiCl4 pre valve closed
7/25/2010	9:10:55 AM	SiCl4 post valve closed
7/25/2010	9:10:55 AM	Bubbler valve closed
7/25/2010	9:10:55 AM	Helium valve opened
7/25/2010	9:10:55 AM	Main Vac valve opened
7/25/2010	9:10:55 AM	Bypass valve opened
7/25/2010	9:10:55 AM	Helium MFC set to  100.000000
7/25/2010	9:10:55 AM	H2 MFC set to  0.000000
7/25/2010	9:10:55 AM	BCl3 MFC set to  0.000000
7/25/2010	9:10:55 AM	PHl3 MFC set to  0.000000
7/25/2010	9:10:55 AM	SiCl4 MFC set to  0.000000
7/25/2010	9:10:55 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:10:55 AM	Tube furnace set to 0
7/25/2010	9:19:55 AM	Helium valve closed
7/25/2010	9:19:55 AM	H2 valve closed
7/25/2010	9:19:55 AM	BCl3 valve closed
7/25/2010	9:19:55 AM	PH3 valve closed
7/25/2010	9:19:55 AM	SiCl4 pre valve closed
7/25/2010	9:19:55 AM	SiCl4 post valve closed
7/25/2010	9:19:55 AM	Bubbler valve closed
7/25/2010	9:19:55 AM	Main Vac valve opened
7/25/2010	9:19:55 AM	Bypass valve opened
7/25/2010	9:19:55 AM	Helium MFC set to  0.000000
7/25/2010	9:19:55 AM	H2 MFC set to  0.000000
7/25/2010	9:19:55 AM	BCl3 MFC set to  0.000000
7/25/2010	9:19:55 AM	PHl3 MFC set to  0.000000
7/25/2010	9:19:55 AM	SiCl4 MFC set to  0.000000
7/25/2010	9:19:55 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:19:55 AM	Tube furnace set to 0
7/25/2010	9:20:55 AM	H2 valve closed
7/25/2010	9:20:55 AM	BCl3 valve closed
7/25/2010	9:20:55 AM	PH3 valve closed
7/25/2010	9:20:55 AM	SiCl4 pre valve closed
7/25/2010	9:20:55 AM	SiCl4 post valve closed
7/25/2010	9:20:55 AM	Bubbler valve closed
7/25/2010	9:20:55 AM	Helium valve opened
7/25/2010	9:20:55 AM	Main Vac valve opened
7/25/2010	9:20:55 AM	Bypass valve opened
7/25/2010	9:20:55 AM	Helium MFC set to  100.000000
7/25/2010	9:20:55 AM	H2 MFC set to  0.000000
7/25/2010	9:20:55 AM	BCl3 MFC set to  0.000000
7/25/2010	9:20:55 AM	PHl3 MFC set to  0.000000
7/25/2010	9:20:55 AM	SiCl4 MFC set to  0.000000
7/25/2010	9:20:55 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:20:55 AM	Tube furnace set to 0
7/25/2010	9:29:55 AM	Helium valve closed
7/25/2010	9:29:55 AM	H2 valve closed
7/25/2010	9:29:55 AM	BCl3 valve closed
7/25/2010	9:29:55 AM	PH3 valve closed
7/25/2010	9:29:55 AM	SiCl4 pre valve closed
7/25/2010	9:29:55 AM	SiCl4 post valve closed
7/25/2010	9:29:55 AM	Bubbler valve closed
7/25/2010	9:29:55 AM	Main Vac valve opened
7/25/2010	9:29:55 AM	Bypass valve opened
7/25/2010	9:29:55 AM	Helium MFC set to  0.000000
7/25/2010	9:29:55 AM	H2 MFC set to  0.000000
7/25/2010	9:29:55 AM	BCl3 MFC set to  0.000000
7/25/2010	9:29:55 AM	PHl3 MFC set to  0.000000
7/25/2010	9:29:55 AM	SiCl4 MFC set to  0.000000
7/25/2010	9:29:55 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:29:56 AM	Tube furnace set to 0
7/25/2010	9:30:56 AM	H2 valve closed
7/25/2010	9:30:56 AM	BCl3 valve closed
7/25/2010	9:30:56 AM	PH3 valve closed
7/25/2010	9:30:56 AM	SiCl4 pre valve closed
7/25/2010	9:30:56 AM	SiCl4 post valve closed
7/25/2010	9:30:56 AM	Bubbler valve closed
7/25/2010	9:30:56 AM	Helium valve opened
7/25/2010	9:30:56 AM	Main Vac valve opened
7/25/2010	9:30:56 AM	Bypass valve opened
7/25/2010	9:30:56 AM	Helium MFC set to  100.000000
7/25/2010	9:30:56 AM	H2 MFC set to  0.000000
7/25/2010	9:30:56 AM	BCl3 MFC set to  0.000000
7/25/2010	9:30:56 AM	PHl3 MFC set to  0.000000
7/25/2010	9:30:56 AM	SiCl4 MFC set to  0.000000
7/25/2010	9:30:56 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:30:56 AM	Tube furnace set to 0
7/25/2010	9:30:58 AM	Helium valve closed
7/25/2010	9:30:58 AM	H2 valve closed
7/25/2010	9:30:58 AM	BCl3 valve closed
7/25/2010	9:30:58 AM	PH3 valve closed
7/25/2010	9:30:58 AM	SiCl4 pre valve closed
7/25/2010	9:30:58 AM	SiCl4 post valve closed
7/25/2010	9:30:58 AM	Bubbler valve closed
7/25/2010	9:30:58 AM	Main Vac valve opened
7/25/2010	9:30:58 AM	Bypass valve opened
7/25/2010	9:30:58 AM	Helium MFC set to  0.000000
7/25/2010	9:30:58 AM	H2 MFC set to  0.000000
7/25/2010	9:30:58 AM	BCl3 MFC set to  0.000000
7/25/2010	9:30:58 AM	PHl3 MFC set to  0.000000
7/25/2010	9:30:58 AM	SiCl4 MFC set to  0.000000
7/25/2010	9:30:58 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:30:58 AM	Tube furnace set to 0
7/25/2010	9:30:59 AM	H2 valve closed
7/25/2010	9:30:59 AM	BCl3 valve closed
7/25/2010	9:30:59 AM	PH3 valve closed
7/25/2010	9:30:59 AM	SiCl4 pre valve closed
7/25/2010	9:30:59 AM	SiCl4 post valve closed
7/25/2010	9:30:59 AM	Bubbler valve closed
7/25/2010	9:30:59 AM	Helium valve opened
7/25/2010	9:30:59 AM	Main Vac valve opened
7/25/2010	9:30:59 AM	Bypass valve opened
7/25/2010	9:30:59 AM	Helium MFC set to  100.000000
7/25/2010	9:30:59 AM	H2 MFC set to  0.000000
7/25/2010	9:30:59 AM	BCl3 MFC set to  0.000000
7/25/2010	9:30:59 AM	PHl3 MFC set to  0.000000
7/25/2010	9:30:59 AM	SiCl4 MFC set to  0.000000
7/25/2010	9:30:59 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:30:59 AM	Tube furnace set to 0
7/25/2010	9:31:59 AM	Helium valve closed
7/25/2010	9:31:59 AM	H2 valve closed
7/25/2010	9:31:59 AM	BCl3 valve closed
7/25/2010	9:31:59 AM	PH3 valve closed
7/25/2010	9:31:59 AM	SiCl4 pre valve closed
7/25/2010	9:31:59 AM	SiCl4 post valve closed
7/25/2010	9:31:59 AM	Bubbler valve closed
7/25/2010	9:31:59 AM	Main Vac valve opened
7/25/2010	9:31:59 AM	Bypass valve opened
7/25/2010	9:31:59 AM	Helium MFC set to  0.000000
7/25/2010	9:31:59 AM	H2 MFC set to  0.000000
7/25/2010	9:31:59 AM	BCl3 MFC set to  0.000000
7/25/2010	9:31:59 AM	PHl3 MFC set to  0.000000
7/25/2010	9:31:59 AM	SiCl4 MFC set to  0.000000
7/25/2010	9:31:59 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:31:59 AM	Tube furnace set to 0
7/25/2010	9:32:00 AM	Run finished at 9:32 AM
7/25/2010	9:40:00 AM	Recipe started at 9:39 AM
7/25/2010	9:40:00 AM	Helium valve closed
7/25/2010	9:40:00 AM	H2 valve closed
7/25/2010	9:40:00 AM	BCl3 valve closed
7/25/2010	9:40:00 AM	PH3 valve closed
7/25/2010	9:40:00 AM	SiCl4 pre valve closed
7/25/2010	9:40:00 AM	SiCl4 post valve closed
7/25/2010	9:40:00 AM	Main Vac valve closed
7/25/2010	9:40:00 AM	Bubbler valve closed
7/25/2010	9:40:00 AM	Bypass valve opened
7/25/2010	9:40:00 AM	Helium MFC set to  0.000000
7/25/2010	9:40:00 AM	H2 MFC set to  0.000000
7/25/2010	9:40:00 AM	BCl3 MFC set to  0.000000
7/25/2010	9:40:00 AM	PHl3 MFC set to  0.000000
7/25/2010	9:40:00 AM	SiCl4 MFC set to  0.000000
7/25/2010	9:40:00 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:40:00 AM	Tube furnace set to 0
7/25/2010	9:40:00 AM	Helium valve closed
7/25/2010	9:40:00 AM	H2 valve closed
7/25/2010	9:40:00 AM	BCl3 valve closed
7/25/2010	9:40:00 AM	PH3 valve closed
7/25/2010	9:40:00 AM	SiCl4 pre valve closed
7/25/2010	9:40:00 AM	SiCl4 post valve closed
7/25/2010	9:40:00 AM	Bubbler valve closed
7/25/2010	9:40:00 AM	Main Vac valve opened
7/25/2010	9:40:00 AM	Bypass valve opened
7/25/2010	9:40:00 AM	Helium MFC set to  0.000000
7/25/2010	9:40:00 AM	H2 MFC set to  0.000000
7/25/2010	9:40:00 AM	BCl3 MFC set to  0.000000
7/25/2010	9:40:00 AM	PHl3 MFC set to  0.000000
7/25/2010	9:40:00 AM	SiCl4 MFC set to  0.000000
7/25/2010	9:40:00 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:40:00 AM	Tube furnace set to 0
7/25/2010	9:41:01 AM	H2 valve closed
7/25/2010	9:41:01 AM	BCl3 valve closed
7/25/2010	9:41:01 AM	PH3 valve closed
7/25/2010	9:41:01 AM	SiCl4 pre valve closed
7/25/2010	9:41:01 AM	SiCl4 post valve closed
7/25/2010	9:41:01 AM	Bubbler valve closed
7/25/2010	9:41:01 AM	Helium valve opened
7/25/2010	9:41:01 AM	Main Vac valve opened
7/25/2010	9:41:01 AM	Bypass valve opened
7/25/2010	9:41:01 AM	Helium MFC set to  100.000000
7/25/2010	9:41:01 AM	H2 MFC set to  0.000000
7/25/2010	9:41:01 AM	BCl3 MFC set to  0.000000
7/25/2010	9:41:01 AM	PHl3 MFC set to  0.000000
7/25/2010	9:41:01 AM	SiCl4 MFC set to  0.000000
7/25/2010	9:41:01 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:41:01 AM	Tube furnace set to 0
7/25/2010	9:50:01 AM	Helium valve closed
7/25/2010	9:50:01 AM	H2 valve closed
7/25/2010	9:50:01 AM	BCl3 valve closed
7/25/2010	9:50:01 AM	PH3 valve closed
7/25/2010	9:50:01 AM	SiCl4 pre valve closed
7/25/2010	9:50:01 AM	SiCl4 post valve closed
7/25/2010	9:50:01 AM	Bubbler valve closed
7/25/2010	9:50:01 AM	Main Vac valve opened
7/25/2010	9:50:01 AM	Bypass valve opened
7/25/2010	9:50:01 AM	Helium MFC set to  0.000000
7/25/2010	9:50:01 AM	H2 MFC set to  0.000000
7/25/2010	9:50:01 AM	BCl3 MFC set to  0.000000
7/25/2010	9:50:01 AM	PHl3 MFC set to  0.000000
7/25/2010	9:50:01 AM	SiCl4 MFC set to  0.000000
7/25/2010	9:50:01 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:50:01 AM	Tube furnace set to 0
7/25/2010	9:51:01 AM	H2 valve closed
7/25/2010	9:51:01 AM	BCl3 valve closed
7/25/2010	9:51:01 AM	PH3 valve closed
7/25/2010	9:51:01 AM	SiCl4 pre valve closed
7/25/2010	9:51:01 AM	SiCl4 post valve closed
7/25/2010	9:51:01 AM	Bubbler valve closed
7/25/2010	9:51:01 AM	Helium valve opened
7/25/2010	9:51:01 AM	Main Vac valve opened
7/25/2010	9:51:01 AM	Bypass valve opened
7/25/2010	9:51:01 AM	Helium MFC set to  100.000000
7/25/2010	9:51:01 AM	H2 MFC set to  0.000000
7/25/2010	9:51:01 AM	BCl3 MFC set to  0.000000
7/25/2010	9:51:01 AM	PHl3 MFC set to  0.000000
7/25/2010	9:51:01 AM	SiCl4 MFC set to  0.000000
7/25/2010	9:51:01 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:51:01 AM	Tube furnace set to 0
7/25/2010	9:51:57 AM	Helium valve closed
7/25/2010	9:51:57 AM	H2 valve closed
7/25/2010	9:51:57 AM	BCl3 valve closed
7/25/2010	9:51:57 AM	PH3 valve closed
7/25/2010	9:51:57 AM	SiCl4 pre valve closed
7/25/2010	9:51:57 AM	SiCl4 post valve closed
7/25/2010	9:51:57 AM	Bubbler valve closed
7/25/2010	9:51:57 AM	Main Vac valve opened
7/25/2010	9:51:57 AM	Bypass valve opened
7/25/2010	9:51:57 AM	Helium MFC set to  0.000000
7/25/2010	9:51:57 AM	H2 MFC set to  0.000000
7/25/2010	9:51:57 AM	BCl3 MFC set to  0.000000
7/25/2010	9:51:57 AM	PHl3 MFC set to  0.000000
7/25/2010	9:51:57 AM	SiCl4 MFC set to  0.000000
7/25/2010	9:51:57 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:51:57 AM	Tube furnace set to 0
7/25/2010	9:52:57 AM	H2 valve closed
7/25/2010	9:52:57 AM	BCl3 valve closed
7/25/2010	9:52:57 AM	PH3 valve closed
7/25/2010	9:52:57 AM	SiCl4 pre valve closed
7/25/2010	9:52:57 AM	SiCl4 post valve closed
7/25/2010	9:52:57 AM	Bubbler valve closed
7/25/2010	9:52:57 AM	Helium valve opened
7/25/2010	9:52:57 AM	Main Vac valve opened
7/25/2010	9:52:57 AM	Bypass valve opened
7/25/2010	9:52:57 AM	Helium MFC set to  100.000000
7/25/2010	9:52:57 AM	H2 MFC set to  0.000000
7/25/2010	9:52:57 AM	BCl3 MFC set to  0.000000
7/25/2010	9:52:57 AM	PHl3 MFC set to  0.000000
7/25/2010	9:52:57 AM	SiCl4 MFC set to  0.000000
7/25/2010	9:52:57 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:52:58 AM	Tube furnace set to 0
7/25/2010	10:01:58 AM	Helium valve closed
7/25/2010	10:01:58 AM	H2 valve closed
7/25/2010	10:01:58 AM	BCl3 valve closed
7/25/2010	10:01:58 AM	PH3 valve closed
7/25/2010	10:01:58 AM	SiCl4 pre valve closed
7/25/2010	10:01:58 AM	SiCl4 post valve closed
7/25/2010	10:01:58 AM	Bubbler valve closed
7/25/2010	10:01:58 AM	Main Vac valve opened
7/25/2010	10:01:58 AM	Bypass valve opened
7/25/2010	10:01:58 AM	Helium MFC set to  0.000000
7/25/2010	10:01:58 AM	H2 MFC set to  0.000000
7/25/2010	10:01:58 AM	BCl3 MFC set to  0.000000
7/25/2010	10:01:58 AM	PHl3 MFC set to  0.000000
7/25/2010	10:01:58 AM	SiCl4 MFC set to  0.000000
7/25/2010	10:01:58 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	10:01:58 AM	Tube furnace set to 0
7/25/2010	10:01:59 AM	Run finished at 10:01 AM
7/25/2010	10:06:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/25/2010	10:06:43 AM	Recipe started at 10:06 AM
7/25/2010	10:06:43 AM	Helium valve closed
7/25/2010	10:06:43 AM	H2 valve closed
7/25/2010	10:06:43 AM	BCl3 valve closed
7/25/2010	10:06:43 AM	PH3 valve closed
7/25/2010	10:06:43 AM	SiCl4 pre valve closed
7/25/2010	10:06:43 AM	SiCl4 post valve closed
7/25/2010	10:06:43 AM	Main Vac valve closed
7/25/2010	10:06:43 AM	Bypass valve closed
7/25/2010	10:06:43 AM	Bubbler valve closed
7/25/2010	10:06:43 AM	Helium MFC set to  0.000000
7/25/2010	10:06:43 AM	H2 MFC set to  0.000000
7/25/2010	10:06:43 AM	BCl3 MFC set to  0.000000
7/25/2010	10:06:43 AM	PHl3 MFC set to  0.000000
7/25/2010	10:06:43 AM	SiCl4 MFC set to  0.000000
7/25/2010	10:06:43 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	10:06:44 AM	Tube furnace set to 0
7/25/2010	10:06:44 AM	Run finished at 10:06 AM
7/25/2010	10:06:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/25/2010	10:06:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	10:06:57 AM	Recipe started at 10:06 AM
7/25/2010	10:06:57 AM	Helium valve closed
7/25/2010	10:06:57 AM	H2 valve closed
7/25/2010	10:06:57 AM	BCl3 valve closed
7/25/2010	10:06:57 AM	PH3 valve closed
7/25/2010	10:06:57 AM	SiCl4 pre valve closed
7/25/2010	10:06:57 AM	SiCl4 post valve closed
7/25/2010	10:06:57 AM	Main Vac valve closed
7/25/2010	10:06:57 AM	Bubbler valve closed
7/25/2010	10:06:57 AM	Bypass valve opened
7/25/2010	10:06:57 AM	Helium MFC set to  0.000000
7/25/2010	10:06:57 AM	H2 MFC set to  0.000000
7/25/2010	10:06:57 AM	BCl3 MFC set to  0.000000
7/25/2010	10:06:57 AM	PHl3 MFC set to  0.000000
7/25/2010	10:06:57 AM	SiCl4 MFC set to  0.000000
7/25/2010	10:06:57 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	10:06:57 AM	Tube furnace set to 0
7/25/2010	10:06:58 AM	Helium valve closed
7/25/2010	10:06:58 AM	H2 valve closed
7/25/2010	10:06:58 AM	BCl3 valve closed
7/25/2010	10:06:58 AM	PH3 valve closed
7/25/2010	10:06:58 AM	SiCl4 pre valve closed
7/25/2010	10:06:58 AM	SiCl4 post valve closed
7/25/2010	10:06:58 AM	Bubbler valve closed
7/25/2010	10:06:58 AM	Main Vac valve opened
7/25/2010	10:06:58 AM	Bypass valve opened
7/25/2010	10:06:58 AM	Helium MFC set to  0.000000
7/25/2010	10:06:58 AM	H2 MFC set to  0.000000
7/25/2010	10:06:58 AM	BCl3 MFC set to  0.000000
7/25/2010	10:06:58 AM	PHl3 MFC set to  0.000000
7/25/2010	10:06:58 AM	SiCl4 MFC set to  0.000000
7/25/2010	10:06:58 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	10:06:58 AM	Tube furnace set to 0
7/25/2010	10:06:58 AM	Run finished at 10:06 AM
7/25/2010	10:06:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	10:08:01 AM	Recipe started at 10:08 AM
7/25/2010	10:08:01 AM	Helium valve closed
7/25/2010	10:08:01 AM	BCl3 valve closed
7/25/2010	10:08:01 AM	PH3 valve closed
7/25/2010	10:08:01 AM	SiCl4 pre valve closed
7/25/2010	10:08:01 AM	SiCl4 post valve closed
7/25/2010	10:08:01 AM	Main Vac valve closed
7/25/2010	10:08:01 AM	Bypass valve closed
7/25/2010	10:08:01 AM	Bubbler valve closed
7/25/2010	10:08:01 AM	H2 valve opened
7/25/2010	10:08:01 AM	Helium MFC set to  0.000000
7/25/2010	10:08:01 AM	H2 MFC set to  500.000000
7/25/2010	10:08:01 AM	BCl3 MFC set to  0.000000
7/25/2010	10:08:01 AM	PHl3 MFC set to  0.000000
7/25/2010	10:08:01 AM	SiCl4 MFC set to  0.000000
7/25/2010	10:08:01 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	10:08:02 AM	Tube furnace set to 0
7/25/2010	10:09:24 AM	Helium valve closed
7/25/2010	10:09:24 AM	BCl3 valve closed
7/25/2010	10:09:24 AM	PH3 valve closed
7/25/2010	10:09:24 AM	SiCl4 pre valve closed
7/25/2010	10:09:24 AM	SiCl4 post valve closed
7/25/2010	10:09:24 AM	Main Vac valve closed
7/25/2010	10:09:24 AM	Bypass valve closed
7/25/2010	10:09:24 AM	H2 valve opened
7/25/2010	10:09:24 AM	Bubbler valve opened
7/25/2010	10:09:24 AM	Helium MFC set to  0.000000
7/25/2010	10:09:24 AM	H2 MFC set to  500.000000
7/25/2010	10:09:24 AM	BCl3 MFC set to  0.000000
7/25/2010	10:09:24 AM	PHl3 MFC set to  0.000000
7/25/2010	10:09:24 AM	SiCl4 MFC set to  0.000000
7/25/2010	10:09:24 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	10:09:24 AM	Tube furnace set to 1000
7/25/2010	10:29:24 AM	Helium valve closed
7/25/2010	10:29:24 AM	PH3 valve closed
7/25/2010	10:29:24 AM	Main Vac valve closed
7/25/2010	10:29:24 AM	Bypass valve closed
7/25/2010	10:29:24 AM	H2 valve opened
7/25/2010	10:29:24 AM	BCl3 valve opened
7/25/2010	10:29:24 AM	SiCl4 pre valve opened
7/25/2010	10:29:24 AM	SiCl4 post valve opened
7/25/2010	10:29:24 AM	Bubbler valve opened
7/25/2010	10:29:24 AM	Helium MFC set to  0.000000
7/25/2010	10:29:24 AM	H2 MFC set to  500.000000
7/25/2010	10:29:24 AM	BCl3 MFC set to  6.000000
7/25/2010	10:29:24 AM	PHl3 MFC set to  0.000000
7/25/2010	10:29:24 AM	SiCl4 MFC set to  50.000000
7/25/2010	10:29:24 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	10:29:24 AM	Tube furnace set to 1000
7/25/2010	10:44:24 AM	H2 valve closed
7/25/2010	10:44:24 AM	BCl3 valve closed
7/25/2010	10:44:24 AM	PH3 valve closed
7/25/2010	10:44:24 AM	SiCl4 pre valve closed
7/25/2010	10:44:24 AM	SiCl4 post valve closed
7/25/2010	10:44:24 AM	Main Vac valve closed
7/25/2010	10:44:24 AM	Bypass valve closed
7/25/2010	10:44:24 AM	Helium valve opened
7/25/2010	10:44:24 AM	Bubbler valve opened
7/25/2010	10:44:24 AM	Helium MFC set to  500.000000
7/25/2010	10:44:24 AM	H2 MFC set to  0.000000
7/25/2010	10:44:24 AM	BCl3 MFC set to  0.000000
7/25/2010	10:44:24 AM	PHl3 MFC set to  0.000000
7/25/2010	10:44:24 AM	SiCl4 MFC set to  0.000000
7/25/2010	10:44:24 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	10:44:25 AM	Tube furnace set to 0
7/25/2010	11:04:25 AM	Helium valve closed
7/25/2010	11:04:25 AM	H2 valve closed
7/25/2010	11:04:25 AM	BCl3 valve closed
7/25/2010	11:04:25 AM	PH3 valve closed
7/25/2010	11:04:25 AM	SiCl4 pre valve closed
7/25/2010	11:04:25 AM	SiCl4 post valve closed
7/25/2010	11:04:25 AM	Main Vac valve closed
7/25/2010	11:04:25 AM	Bypass valve closed
7/25/2010	11:04:25 AM	Bubbler valve closed
7/25/2010	11:04:25 AM	Helium MFC set to  0.000000
7/25/2010	11:04:25 AM	H2 MFC set to  0.000000
7/25/2010	11:04:25 AM	BCl3 MFC set to  0.000000
7/25/2010	11:04:25 AM	PHl3 MFC set to  0.000000
7/25/2010	11:04:25 AM	SiCl4 MFC set to  0.000000
7/25/2010	11:04:25 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	11:04:25 AM	Tube furnace set to 0
7/25/2010	11:04:25 AM	Run finished at 11:04 AM
7/25/2010	11:09:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2010	11:09:20 AM	Recipe started at 11:09 AM
7/25/2010	11:09:20 AM	H2 valve closed
7/25/2010	11:09:20 AM	BCl3 valve closed
7/25/2010	11:09:20 AM	PH3 valve closed
7/25/2010	11:09:20 AM	SiCl4 pre valve closed
7/25/2010	11:09:20 AM	SiCl4 post valve closed
7/25/2010	11:09:20 AM	Main Vac valve closed
7/25/2010	11:09:20 AM	Bypass valve closed
7/25/2010	11:09:20 AM	Bubbler valve closed
7/25/2010	11:09:20 AM	Helium valve opened
7/25/2010	11:09:20 AM	Helium MFC set to  500.000000
7/25/2010	11:09:20 AM	H2 MFC set to  0.000000
7/25/2010	11:09:20 AM	BCl3 MFC set to  0.000000
7/25/2010	11:09:20 AM	PHl3 MFC set to  0.000000
7/25/2010	11:09:20 AM	SiCl4 MFC set to  0.000000
7/25/2010	11:09:20 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	11:09:20 AM	Tube furnace set to 0
7/25/2010	11:09:22 AM	Helium valve closed
7/25/2010	11:09:22 AM	H2 valve closed
7/25/2010	11:09:22 AM	BCl3 valve closed
7/25/2010	11:09:22 AM	PH3 valve closed
7/25/2010	11:09:22 AM	SiCl4 pre valve closed
7/25/2010	11:09:22 AM	SiCl4 post valve closed
7/25/2010	11:09:22 AM	Main Vac valve closed
7/25/2010	11:09:22 AM	Bypass valve closed
7/25/2010	11:09:22 AM	Bubbler valve closed
7/25/2010	11:09:22 AM	Helium MFC set to  0.000000
7/25/2010	11:09:22 AM	H2 MFC set to  0.000000
7/25/2010	11:09:22 AM	BCl3 MFC set to  0.000000
7/25/2010	11:09:22 AM	PHl3 MFC set to  0.000000
7/25/2010	11:09:22 AM	SiCl4 MFC set to  0.000000
7/25/2010	11:09:22 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	11:09:22 AM	Tube furnace set to 0
7/25/2010	11:09:23 AM	Run finished at 11:09 AM
7/25/2010	11:09:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2010	11:21:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	11:21:40 AM	Recipe started at 11:21 AM
7/25/2010	11:21:40 AM	Helium valve closed
7/25/2010	11:21:40 AM	H2 valve closed
7/25/2010	11:21:40 AM	BCl3 valve closed
7/25/2010	11:21:40 AM	PH3 valve closed
7/25/2010	11:21:40 AM	SiCl4 pre valve closed
7/25/2010	11:21:40 AM	SiCl4 post valve closed
7/25/2010	11:21:40 AM	Main Vac valve closed
7/25/2010	11:21:40 AM	Bubbler valve closed
7/25/2010	11:21:40 AM	Bypass valve opened
7/25/2010	11:21:40 AM	Helium MFC set to  0.000000
7/25/2010	11:21:40 AM	H2 MFC set to  0.000000
7/25/2010	11:21:40 AM	BCl3 MFC set to  0.000000
7/25/2010	11:21:40 AM	PHl3 MFC set to  0.000000
7/25/2010	11:21:40 AM	SiCl4 MFC set to  0.000000
7/25/2010	11:21:40 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	11:21:40 AM	Tube furnace set to 0
7/25/2010	11:22:16 AM	Helium valve closed
7/25/2010	11:22:16 AM	H2 valve closed
7/25/2010	11:22:16 AM	BCl3 valve closed
7/25/2010	11:22:16 AM	PH3 valve closed
7/25/2010	11:22:16 AM	SiCl4 pre valve closed
7/25/2010	11:22:16 AM	SiCl4 post valve closed
7/25/2010	11:22:16 AM	Bubbler valve closed
7/25/2010	11:22:16 AM	Main Vac valve opened
7/25/2010	11:22:16 AM	Bypass valve opened
7/25/2010	11:22:16 AM	Helium MFC set to  0.000000
7/25/2010	11:22:16 AM	H2 MFC set to  0.000000
7/25/2010	11:22:16 AM	BCl3 MFC set to  0.000000
7/25/2010	11:22:16 AM	PHl3 MFC set to  0.000000
7/25/2010	11:22:16 AM	SiCl4 MFC set to  0.000000
7/25/2010	11:22:16 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	11:22:16 AM	Tube furnace set to 0
7/25/2010	11:22:16 AM	Run finished at 11:22 AM
7/25/2010	11:22:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	11:22:44 AM	Recipe started at 11:22 AM
7/25/2010	11:22:44 AM	Helium valve closed
7/25/2010	11:22:44 AM	H2 valve closed
7/25/2010	11:22:44 AM	BCl3 valve closed
7/25/2010	11:22:44 AM	PH3 valve closed
7/25/2010	11:22:44 AM	SiCl4 pre valve closed
7/25/2010	11:22:44 AM	SiCl4 post valve closed
7/25/2010	11:22:44 AM	Main Vac valve closed
7/25/2010	11:22:44 AM	Bubbler valve closed
7/25/2010	11:22:44 AM	Bypass valve opened
7/25/2010	11:22:44 AM	Helium MFC set to  0.000000
7/25/2010	11:22:44 AM	H2 MFC set to  0.000000
7/25/2010	11:22:44 AM	BCl3 MFC set to  0.000000
7/25/2010	11:22:44 AM	PHl3 MFC set to  0.000000
7/25/2010	11:22:44 AM	SiCl4 MFC set to  0.000000
7/25/2010	11:22:44 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	11:22:45 AM	Tube furnace set to 0
7/25/2010	11:22:45 AM	Helium valve closed
7/25/2010	11:22:45 AM	H2 valve closed
7/25/2010	11:22:45 AM	BCl3 valve closed
7/25/2010	11:22:45 AM	PH3 valve closed
7/25/2010	11:22:45 AM	SiCl4 pre valve closed
7/25/2010	11:22:45 AM	SiCl4 post valve closed
7/25/2010	11:22:45 AM	Bubbler valve closed
7/25/2010	11:22:45 AM	Main Vac valve opened
7/25/2010	11:22:45 AM	Bypass valve opened
7/25/2010	11:22:45 AM	Helium MFC set to  0.000000
7/25/2010	11:22:45 AM	H2 MFC set to  0.000000
7/25/2010	11:22:45 AM	BCl3 MFC set to  0.000000
7/25/2010	11:22:45 AM	PHl3 MFC set to  0.000000
7/25/2010	11:22:45 AM	SiCl4 MFC set to  0.000000
7/25/2010	11:22:45 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	11:22:45 AM	Tube furnace set to 0
7/25/2010	11:23:45 AM	H2 valve closed
7/25/2010	11:23:45 AM	BCl3 valve closed
7/25/2010	11:23:45 AM	PH3 valve closed
7/25/2010	11:23:45 AM	SiCl4 pre valve closed
7/25/2010	11:23:45 AM	SiCl4 post valve closed
7/25/2010	11:23:45 AM	Bubbler valve closed
7/25/2010	11:23:45 AM	Helium valve opened
7/25/2010	11:23:45 AM	Main Vac valve opened
7/25/2010	11:23:45 AM	Bypass valve opened
7/25/2010	11:23:45 AM	Helium MFC set to  100.000000
7/25/2010	11:23:45 AM	H2 MFC set to  0.000000
7/25/2010	11:23:45 AM	BCl3 MFC set to  0.000000
7/25/2010	11:23:45 AM	PHl3 MFC set to  0.000000
7/25/2010	11:23:45 AM	SiCl4 MFC set to  0.000000
7/25/2010	11:23:45 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	11:23:45 AM	Tube furnace set to 0
7/25/2010	11:32:45 AM	Helium valve closed
7/25/2010	11:32:45 AM	H2 valve closed
7/25/2010	11:32:45 AM	BCl3 valve closed
7/25/2010	11:32:45 AM	PH3 valve closed
7/25/2010	11:32:45 AM	SiCl4 pre valve closed
7/25/2010	11:32:45 AM	SiCl4 post valve closed
7/25/2010	11:32:45 AM	Bubbler valve closed
7/25/2010	11:32:45 AM	Main Vac valve opened
7/25/2010	11:32:45 AM	Bypass valve opened
7/25/2010	11:32:45 AM	Helium MFC set to  0.000000
7/25/2010	11:32:45 AM	H2 MFC set to  0.000000
7/25/2010	11:32:45 AM	BCl3 MFC set to  0.000000
7/25/2010	11:32:45 AM	PHl3 MFC set to  0.000000
7/25/2010	11:32:45 AM	SiCl4 MFC set to  0.000000
7/25/2010	11:32:45 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	11:32:45 AM	Tube furnace set to 0
7/25/2010	11:33:45 AM	H2 valve closed
7/25/2010	11:33:45 AM	BCl3 valve closed
7/25/2010	11:33:45 AM	PH3 valve closed
7/25/2010	11:33:45 AM	SiCl4 pre valve closed
7/25/2010	11:33:45 AM	SiCl4 post valve closed
7/25/2010	11:33:45 AM	Bubbler valve closed
7/25/2010	11:33:45 AM	Helium valve opened
7/25/2010	11:33:45 AM	Main Vac valve opened
7/25/2010	11:33:45 AM	Bypass valve opened
7/25/2010	11:33:45 AM	Helium MFC set to  100.000000
7/25/2010	11:33:45 AM	H2 MFC set to  0.000000
7/25/2010	11:33:45 AM	BCl3 MFC set to  0.000000
7/25/2010	11:33:45 AM	PHl3 MFC set to  0.000000
7/25/2010	11:33:45 AM	SiCl4 MFC set to  0.000000
7/25/2010	11:33:45 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	11:33:46 AM	Tube furnace set to 0
7/25/2010	11:42:46 AM	Helium valve closed
7/25/2010	11:42:46 AM	H2 valve closed
7/25/2010	11:42:46 AM	BCl3 valve closed
7/25/2010	11:42:46 AM	PH3 valve closed
7/25/2010	11:42:46 AM	SiCl4 pre valve closed
7/25/2010	11:42:46 AM	SiCl4 post valve closed
7/25/2010	11:42:46 AM	Bubbler valve closed
7/25/2010	11:42:46 AM	Main Vac valve opened
7/25/2010	11:42:46 AM	Bypass valve opened
7/25/2010	11:42:46 AM	Helium MFC set to  0.000000
7/25/2010	11:42:46 AM	H2 MFC set to  0.000000
7/25/2010	11:42:46 AM	BCl3 MFC set to  0.000000
7/25/2010	11:42:46 AM	PHl3 MFC set to  0.000000
7/25/2010	11:42:46 AM	SiCl4 MFC set to  0.000000
7/25/2010	11:42:46 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	11:42:46 AM	Tube furnace set to 0
7/25/2010	11:43:46 AM	H2 valve closed
7/25/2010	11:43:46 AM	BCl3 valve closed
7/25/2010	11:43:46 AM	PH3 valve closed
7/25/2010	11:43:46 AM	SiCl4 pre valve closed
7/25/2010	11:43:46 AM	SiCl4 post valve closed
7/25/2010	11:43:46 AM	Bubbler valve closed
7/25/2010	11:43:46 AM	Helium valve opened
7/25/2010	11:43:46 AM	Main Vac valve opened
7/25/2010	11:43:46 AM	Bypass valve opened
7/25/2010	11:43:46 AM	Helium MFC set to  100.000000
7/25/2010	11:43:46 AM	H2 MFC set to  0.000000
7/25/2010	11:43:46 AM	BCl3 MFC set to  0.000000
7/25/2010	11:43:46 AM	PHl3 MFC set to  0.000000
7/25/2010	11:43:46 AM	SiCl4 MFC set to  0.000000
7/25/2010	11:43:46 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	11:43:46 AM	Tube furnace set to 0
7/25/2010	11:52:46 AM	Helium valve closed
7/25/2010	11:52:46 AM	H2 valve closed
7/25/2010	11:52:46 AM	BCl3 valve closed
7/25/2010	11:52:46 AM	PH3 valve closed
7/25/2010	11:52:46 AM	SiCl4 pre valve closed
7/25/2010	11:52:46 AM	SiCl4 post valve closed
7/25/2010	11:52:46 AM	Bubbler valve closed
7/25/2010	11:52:46 AM	Main Vac valve opened
7/25/2010	11:52:46 AM	Bypass valve opened
7/25/2010	11:52:46 AM	Helium MFC set to  0.000000
7/25/2010	11:52:46 AM	H2 MFC set to  0.000000
7/25/2010	11:52:46 AM	BCl3 MFC set to  0.000000
7/25/2010	11:52:46 AM	PHl3 MFC set to  0.000000
7/25/2010	11:52:46 AM	SiCl4 MFC set to  0.000000
7/25/2010	11:52:46 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	11:52:46 AM	Tube furnace set to 0
7/25/2010	11:53:46 AM	H2 valve closed
7/25/2010	11:53:46 AM	BCl3 valve closed
7/25/2010	11:53:46 AM	PH3 valve closed
7/25/2010	11:53:46 AM	SiCl4 pre valve closed
7/25/2010	11:53:46 AM	SiCl4 post valve closed
7/25/2010	11:53:46 AM	Bubbler valve closed
7/25/2010	11:53:46 AM	Helium valve opened
7/25/2010	11:53:46 AM	Main Vac valve opened
7/25/2010	11:53:46 AM	Bypass valve opened
7/25/2010	11:53:46 AM	Helium MFC set to  100.000000
7/25/2010	11:53:46 AM	H2 MFC set to  0.000000
7/25/2010	11:53:46 AM	BCl3 MFC set to  0.000000
7/25/2010	11:53:46 AM	PHl3 MFC set to  0.000000
7/25/2010	11:53:46 AM	SiCl4 MFC set to  0.000000
7/25/2010	11:53:46 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	11:53:46 AM	Tube furnace set to 0
7/25/2010	11:54:46 AM	Helium valve closed
7/25/2010	11:54:46 AM	H2 valve closed
7/25/2010	11:54:46 AM	BCl3 valve closed
7/25/2010	11:54:46 AM	PH3 valve closed
7/25/2010	11:54:46 AM	SiCl4 pre valve closed
7/25/2010	11:54:46 AM	SiCl4 post valve closed
7/25/2010	11:54:46 AM	Bubbler valve closed
7/25/2010	11:54:46 AM	Main Vac valve opened
7/25/2010	11:54:46 AM	Bypass valve opened
7/25/2010	11:54:46 AM	Helium MFC set to  0.000000
7/25/2010	11:54:46 AM	H2 MFC set to  0.000000
7/25/2010	11:54:46 AM	BCl3 MFC set to  0.000000
7/25/2010	11:54:46 AM	PHl3 MFC set to  0.000000
7/25/2010	11:54:46 AM	SiCl4 MFC set to  0.000000
7/25/2010	11:54:46 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	11:54:47 AM	Tube furnace set to 0
7/25/2010	11:55:47 AM	H2 valve closed
7/25/2010	11:55:47 AM	BCl3 valve closed
7/25/2010	11:55:47 AM	PH3 valve closed
7/25/2010	11:55:47 AM	SiCl4 pre valve closed
7/25/2010	11:55:47 AM	SiCl4 post valve closed
7/25/2010	11:55:47 AM	Bubbler valve closed
7/25/2010	11:55:47 AM	Helium valve opened
7/25/2010	11:55:47 AM	Main Vac valve opened
7/25/2010	11:55:47 AM	Bypass valve opened
7/25/2010	11:55:47 AM	Helium MFC set to  100.000000
7/25/2010	11:55:47 AM	H2 MFC set to  0.000000
7/25/2010	11:55:47 AM	BCl3 MFC set to  0.000000
7/25/2010	11:55:47 AM	PHl3 MFC set to  0.000000
7/25/2010	11:55:47 AM	SiCl4 MFC set to  0.000000
7/25/2010	11:55:47 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	11:55:47 AM	Tube furnace set to 0
7/25/2010	11:56:47 AM	Helium valve closed
7/25/2010	11:56:47 AM	H2 valve closed
7/25/2010	11:56:47 AM	BCl3 valve closed
7/25/2010	11:56:47 AM	PH3 valve closed
7/25/2010	11:56:47 AM	SiCl4 pre valve closed
7/25/2010	11:56:47 AM	SiCl4 post valve closed
7/25/2010	11:56:47 AM	Bubbler valve closed
7/25/2010	11:56:47 AM	Main Vac valve opened
7/25/2010	11:56:47 AM	Bypass valve opened
7/25/2010	11:56:47 AM	Helium MFC set to  0.000000
7/25/2010	11:56:47 AM	H2 MFC set to  0.000000
7/25/2010	11:56:47 AM	BCl3 MFC set to  0.000000
7/25/2010	11:56:47 AM	PHl3 MFC set to  0.000000
7/25/2010	11:56:47 AM	SiCl4 MFC set to  0.000000
7/25/2010	11:56:47 AM	Bypass solenoid MFC set to  0.000000
7/25/2010	11:56:47 AM	Tube furnace set to 0
7/25/2010	11:56:48 AM	Run finished at 11:56 AM
7/25/2010	12:14:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/25/2010	12:14:03 PM	Recipe started at 12:14 PM
7/25/2010	12:14:03 PM	Helium valve closed
7/25/2010	12:14:03 PM	H2 valve closed
7/25/2010	12:14:03 PM	BCl3 valve closed
7/25/2010	12:14:03 PM	PH3 valve closed
7/25/2010	12:14:03 PM	SiCl4 pre valve closed
7/25/2010	12:14:03 PM	SiCl4 post valve closed
7/25/2010	12:14:03 PM	Main Vac valve closed
7/25/2010	12:14:03 PM	Bypass valve closed
7/25/2010	12:14:03 PM	Bubbler valve closed
7/25/2010	12:14:03 PM	Helium MFC set to  0.000000
7/25/2010	12:14:03 PM	H2 MFC set to  0.000000
7/25/2010	12:14:03 PM	BCl3 MFC set to  0.000000
7/25/2010	12:14:03 PM	PHl3 MFC set to  0.000000
7/25/2010	12:14:03 PM	SiCl4 MFC set to  0.000000
7/25/2010	12:14:03 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	12:14:04 PM	Tube furnace set to 0
7/25/2010	12:14:04 PM	Run finished at 12:14 PM
7/25/2010	12:14:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/25/2010	12:14:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	12:14:18 PM	Recipe started at 12:14 PM
7/25/2010	12:14:18 PM	Helium valve closed
7/25/2010	12:14:18 PM	H2 valve closed
7/25/2010	12:14:18 PM	BCl3 valve closed
7/25/2010	12:14:18 PM	PH3 valve closed
7/25/2010	12:14:18 PM	SiCl4 pre valve closed
7/25/2010	12:14:18 PM	SiCl4 post valve closed
7/25/2010	12:14:18 PM	Main Vac valve closed
7/25/2010	12:14:18 PM	Bubbler valve closed
7/25/2010	12:14:18 PM	Bypass valve opened
7/25/2010	12:14:18 PM	Helium MFC set to  0.000000
7/25/2010	12:14:18 PM	H2 MFC set to  0.000000
7/25/2010	12:14:18 PM	BCl3 MFC set to  0.000000
7/25/2010	12:14:18 PM	PHl3 MFC set to  0.000000
7/25/2010	12:14:18 PM	SiCl4 MFC set to  0.000000
7/25/2010	12:14:18 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	12:14:18 PM	Tube furnace set to 0
7/25/2010	12:14:19 PM	Helium valve closed
7/25/2010	12:14:19 PM	H2 valve closed
7/25/2010	12:14:19 PM	BCl3 valve closed
7/25/2010	12:14:19 PM	PH3 valve closed
7/25/2010	12:14:19 PM	SiCl4 pre valve closed
7/25/2010	12:14:19 PM	SiCl4 post valve closed
7/25/2010	12:14:19 PM	Bubbler valve closed
7/25/2010	12:14:19 PM	Main Vac valve opened
7/25/2010	12:14:19 PM	Bypass valve opened
7/25/2010	12:14:19 PM	Helium MFC set to  0.000000
7/25/2010	12:14:19 PM	H2 MFC set to  0.000000
7/25/2010	12:14:19 PM	BCl3 MFC set to  0.000000
7/25/2010	12:14:19 PM	PHl3 MFC set to  0.000000
7/25/2010	12:14:19 PM	SiCl4 MFC set to  0.000000
7/25/2010	12:14:19 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	12:14:19 PM	Tube furnace set to 0
7/25/2010	12:14:19 PM	Run finished at 12:14 PM
7/25/2010	12:14:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	12:14:30 PM	Recipe started at 12:14 PM
7/25/2010	12:14:30 PM	Helium valve closed
7/25/2010	12:14:30 PM	H2 valve closed
7/25/2010	12:14:30 PM	BCl3 valve closed
7/25/2010	12:14:30 PM	PH3 valve closed
7/25/2010	12:14:30 PM	SiCl4 pre valve closed
7/25/2010	12:14:30 PM	SiCl4 post valve closed
7/25/2010	12:14:30 PM	Main Vac valve closed
7/25/2010	12:14:30 PM	Bubbler valve closed
7/25/2010	12:14:30 PM	Bypass valve opened
7/25/2010	12:14:30 PM	Helium MFC set to  0.000000
7/25/2010	12:14:30 PM	H2 MFC set to  0.000000
7/25/2010	12:14:30 PM	BCl3 MFC set to  0.000000
7/25/2010	12:14:30 PM	PHl3 MFC set to  0.000000
7/25/2010	12:14:30 PM	SiCl4 MFC set to  0.000000
7/25/2010	12:14:30 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	12:14:30 PM	Tube furnace set to 0
7/25/2010	12:14:31 PM	Helium valve closed
7/25/2010	12:14:31 PM	H2 valve closed
7/25/2010	12:14:31 PM	BCl3 valve closed
7/25/2010	12:14:31 PM	PH3 valve closed
7/25/2010	12:14:31 PM	SiCl4 pre valve closed
7/25/2010	12:14:31 PM	SiCl4 post valve closed
7/25/2010	12:14:31 PM	Bubbler valve closed
7/25/2010	12:14:31 PM	Main Vac valve opened
7/25/2010	12:14:31 PM	Bypass valve opened
7/25/2010	12:14:31 PM	Helium MFC set to  0.000000
7/25/2010	12:14:31 PM	H2 MFC set to  0.000000
7/25/2010	12:14:31 PM	BCl3 MFC set to  0.000000
7/25/2010	12:14:31 PM	PHl3 MFC set to  0.000000
7/25/2010	12:14:31 PM	SiCl4 MFC set to  0.000000
7/25/2010	12:14:31 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	12:14:31 PM	Tube furnace set to 0
7/25/2010	12:15:31 PM	H2 valve closed
7/25/2010	12:15:31 PM	BCl3 valve closed
7/25/2010	12:15:31 PM	PH3 valve closed
7/25/2010	12:15:31 PM	SiCl4 pre valve closed
7/25/2010	12:15:31 PM	SiCl4 post valve closed
7/25/2010	12:15:31 PM	Bubbler valve closed
7/25/2010	12:15:31 PM	Helium valve opened
7/25/2010	12:15:31 PM	Main Vac valve opened
7/25/2010	12:15:31 PM	Bypass valve opened
7/25/2010	12:15:31 PM	Helium MFC set to  100.000000
7/25/2010	12:15:31 PM	H2 MFC set to  0.000000
7/25/2010	12:15:31 PM	BCl3 MFC set to  0.000000
7/25/2010	12:15:31 PM	PHl3 MFC set to  0.000000
7/25/2010	12:15:31 PM	SiCl4 MFC set to  0.000000
7/25/2010	12:15:31 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	12:15:31 PM	Tube furnace set to 0
7/25/2010	12:24:31 PM	Helium valve closed
7/25/2010	12:24:31 PM	H2 valve closed
7/25/2010	12:24:31 PM	BCl3 valve closed
7/25/2010	12:24:31 PM	PH3 valve closed
7/25/2010	12:24:31 PM	SiCl4 pre valve closed
7/25/2010	12:24:31 PM	SiCl4 post valve closed
7/25/2010	12:24:31 PM	Bubbler valve closed
7/25/2010	12:24:31 PM	Main Vac valve opened
7/25/2010	12:24:31 PM	Bypass valve opened
7/25/2010	12:24:31 PM	Helium MFC set to  0.000000
7/25/2010	12:24:31 PM	H2 MFC set to  0.000000
7/25/2010	12:24:31 PM	BCl3 MFC set to  0.000000
7/25/2010	12:24:31 PM	PHl3 MFC set to  0.000000
7/25/2010	12:24:31 PM	SiCl4 MFC set to  0.000000
7/25/2010	12:24:31 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	12:24:31 PM	Tube furnace set to 0
7/25/2010	12:25:31 PM	H2 valve closed
7/25/2010	12:25:31 PM	BCl3 valve closed
7/25/2010	12:25:31 PM	PH3 valve closed
7/25/2010	12:25:31 PM	SiCl4 pre valve closed
7/25/2010	12:25:31 PM	SiCl4 post valve closed
7/25/2010	12:25:31 PM	Bubbler valve closed
7/25/2010	12:25:31 PM	Helium valve opened
7/25/2010	12:25:31 PM	Main Vac valve opened
7/25/2010	12:25:31 PM	Bypass valve opened
7/25/2010	12:25:31 PM	Helium MFC set to  100.000000
7/25/2010	12:25:31 PM	H2 MFC set to  0.000000
7/25/2010	12:25:31 PM	BCl3 MFC set to  0.000000
7/25/2010	12:25:31 PM	PHl3 MFC set to  0.000000
7/25/2010	12:25:31 PM	SiCl4 MFC set to  0.000000
7/25/2010	12:25:31 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	12:25:31 PM	Tube furnace set to 0
7/25/2010	12:26:45 PM	Helium valve closed
7/25/2010	12:26:45 PM	H2 valve closed
7/25/2010	12:26:45 PM	BCl3 valve closed
7/25/2010	12:26:45 PM	PH3 valve closed
7/25/2010	12:26:45 PM	SiCl4 pre valve closed
7/25/2010	12:26:45 PM	SiCl4 post valve closed
7/25/2010	12:26:45 PM	Bubbler valve closed
7/25/2010	12:26:45 PM	Main Vac valve opened
7/25/2010	12:26:45 PM	Bypass valve opened
7/25/2010	12:26:45 PM	Helium MFC set to  0.000000
7/25/2010	12:26:45 PM	H2 MFC set to  0.000000
7/25/2010	12:26:45 PM	BCl3 MFC set to  0.000000
7/25/2010	12:26:45 PM	PHl3 MFC set to  0.000000
7/25/2010	12:26:45 PM	SiCl4 MFC set to  0.000000
7/25/2010	12:26:45 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	12:26:46 PM	Tube furnace set to 0
7/25/2010	12:26:46 PM	H2 valve closed
7/25/2010	12:26:46 PM	BCl3 valve closed
7/25/2010	12:26:46 PM	PH3 valve closed
7/25/2010	12:26:46 PM	SiCl4 pre valve closed
7/25/2010	12:26:46 PM	SiCl4 post valve closed
7/25/2010	12:26:46 PM	Bubbler valve closed
7/25/2010	12:26:46 PM	Helium valve opened
7/25/2010	12:26:46 PM	Main Vac valve opened
7/25/2010	12:26:46 PM	Bypass valve opened
7/25/2010	12:26:46 PM	Helium MFC set to  100.000000
7/25/2010	12:26:46 PM	H2 MFC set to  0.000000
7/25/2010	12:26:46 PM	BCl3 MFC set to  0.000000
7/25/2010	12:26:46 PM	PHl3 MFC set to  0.000000
7/25/2010	12:26:46 PM	SiCl4 MFC set to  0.000000
7/25/2010	12:26:46 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	12:26:46 PM	Tube furnace set to 0
7/25/2010	12:35:46 PM	Helium valve closed
7/25/2010	12:35:46 PM	H2 valve closed
7/25/2010	12:35:46 PM	BCl3 valve closed
7/25/2010	12:35:46 PM	PH3 valve closed
7/25/2010	12:35:46 PM	SiCl4 pre valve closed
7/25/2010	12:35:46 PM	SiCl4 post valve closed
7/25/2010	12:35:46 PM	Bubbler valve closed
7/25/2010	12:35:46 PM	Main Vac valve opened
7/25/2010	12:35:46 PM	Bypass valve opened
7/25/2010	12:35:46 PM	Helium MFC set to  0.000000
7/25/2010	12:35:46 PM	H2 MFC set to  0.000000
7/25/2010	12:35:46 PM	BCl3 MFC set to  0.000000
7/25/2010	12:35:46 PM	PHl3 MFC set to  0.000000
7/25/2010	12:35:46 PM	SiCl4 MFC set to  0.000000
7/25/2010	12:35:46 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	12:35:46 PM	Tube furnace set to 0
7/25/2010	12:35:47 PM	Run finished at 12:35 PM
7/25/2010	12:39:26 PM	Recipe started at 12:39 PM
7/25/2010	12:39:26 PM	Helium valve closed
7/25/2010	12:39:26 PM	BCl3 valve closed
7/25/2010	12:39:26 PM	PH3 valve closed
7/25/2010	12:39:26 PM	SiCl4 pre valve closed
7/25/2010	12:39:26 PM	SiCl4 post valve closed
7/25/2010	12:39:26 PM	Main Vac valve closed
7/25/2010	12:39:26 PM	Bypass valve closed
7/25/2010	12:39:26 PM	Bubbler valve closed
7/25/2010	12:39:26 PM	H2 valve opened
7/25/2010	12:39:26 PM	Helium MFC set to  0.000000
7/25/2010	12:39:26 PM	H2 MFC set to  500.000000
7/25/2010	12:39:26 PM	BCl3 MFC set to  0.000000
7/25/2010	12:39:26 PM	PHl3 MFC set to  0.000000
7/25/2010	12:39:26 PM	SiCl4 MFC set to  0.000000
7/25/2010	12:39:26 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	12:39:26 PM	Tube furnace set to 0
7/25/2010	12:40:46 PM	Helium valve closed
7/25/2010	12:40:46 PM	BCl3 valve closed
7/25/2010	12:40:46 PM	PH3 valve closed
7/25/2010	12:40:46 PM	SiCl4 pre valve closed
7/25/2010	12:40:46 PM	SiCl4 post valve closed
7/25/2010	12:40:46 PM	Main Vac valve closed
7/25/2010	12:40:46 PM	Bypass valve closed
7/25/2010	12:40:46 PM	H2 valve opened
7/25/2010	12:40:46 PM	Bubbler valve opened
7/25/2010	12:40:46 PM	Helium MFC set to  0.000000
7/25/2010	12:40:46 PM	H2 MFC set to  500.000000
7/25/2010	12:40:46 PM	BCl3 MFC set to  0.000000
7/25/2010	12:40:46 PM	PHl3 MFC set to  0.000000
7/25/2010	12:40:46 PM	SiCl4 MFC set to  0.000000
7/25/2010	12:40:46 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	12:40:46 PM	Tube furnace set to 1000
7/25/2010	1:00:46 PM	Helium valve closed
7/25/2010	1:00:46 PM	PH3 valve closed
7/25/2010	1:00:46 PM	Main Vac valve closed
7/25/2010	1:00:46 PM	Bypass valve closed
7/25/2010	1:00:46 PM	H2 valve opened
7/25/2010	1:00:46 PM	BCl3 valve opened
7/25/2010	1:00:46 PM	SiCl4 pre valve opened
7/25/2010	1:00:46 PM	SiCl4 post valve opened
7/25/2010	1:00:46 PM	Bubbler valve opened
7/25/2010	1:00:46 PM	Helium MFC set to  0.000000
7/25/2010	1:00:46 PM	H2 MFC set to  500.000000
7/25/2010	1:00:46 PM	BCl3 MFC set to  6.000000
7/25/2010	1:00:46 PM	PHl3 MFC set to  0.000000
7/25/2010	1:00:46 PM	SiCl4 MFC set to  50.000000
7/25/2010	1:00:46 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	1:00:46 PM	Tube furnace set to 1000
7/25/2010	1:15:46 PM	H2 valve closed
7/25/2010	1:15:46 PM	BCl3 valve closed
7/25/2010	1:15:46 PM	PH3 valve closed
7/25/2010	1:15:46 PM	SiCl4 pre valve closed
7/25/2010	1:15:46 PM	SiCl4 post valve closed
7/25/2010	1:15:46 PM	Main Vac valve closed
7/25/2010	1:15:46 PM	Bypass valve closed
7/25/2010	1:15:46 PM	Helium valve opened
7/25/2010	1:15:46 PM	Bubbler valve opened
7/25/2010	1:15:46 PM	Helium MFC set to  500.000000
7/25/2010	1:15:46 PM	H2 MFC set to  0.000000
7/25/2010	1:15:46 PM	BCl3 MFC set to  0.000000
7/25/2010	1:15:46 PM	PHl3 MFC set to  0.000000
7/25/2010	1:15:46 PM	SiCl4 MFC set to  0.000000
7/25/2010	1:15:46 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	1:15:46 PM	Tube furnace set to 0
7/25/2010	1:35:46 PM	Helium valve closed
7/25/2010	1:35:46 PM	H2 valve closed
7/25/2010	1:35:46 PM	BCl3 valve closed
7/25/2010	1:35:46 PM	PH3 valve closed
7/25/2010	1:35:46 PM	SiCl4 pre valve closed
7/25/2010	1:35:46 PM	SiCl4 post valve closed
7/25/2010	1:35:46 PM	Main Vac valve closed
7/25/2010	1:35:46 PM	Bypass valve closed
7/25/2010	1:35:46 PM	Bubbler valve closed
7/25/2010	1:35:46 PM	Helium MFC set to  0.000000
7/25/2010	1:35:46 PM	H2 MFC set to  0.000000
7/25/2010	1:35:46 PM	BCl3 MFC set to  0.000000
7/25/2010	1:35:46 PM	PHl3 MFC set to  0.000000
7/25/2010	1:35:46 PM	SiCl4 MFC set to  0.000000
7/25/2010	1:35:46 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	1:35:46 PM	Tube furnace set to 0
7/25/2010	1:35:47 PM	Run finished at 1:35 PM
7/25/2010	2:25:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2010	2:25:50 PM	Recipe started at 2:25 PM
7/25/2010	2:25:50 PM	H2 valve closed
7/25/2010	2:25:50 PM	BCl3 valve closed
7/25/2010	2:25:50 PM	PH3 valve closed
7/25/2010	2:25:50 PM	SiCl4 pre valve closed
7/25/2010	2:25:50 PM	SiCl4 post valve closed
7/25/2010	2:25:50 PM	Main Vac valve closed
7/25/2010	2:25:50 PM	Bypass valve closed
7/25/2010	2:25:50 PM	Bubbler valve closed
7/25/2010	2:25:50 PM	Helium valve opened
7/25/2010	2:25:50 PM	Helium MFC set to  500.000000
7/25/2010	2:25:50 PM	H2 MFC set to  0.000000
7/25/2010	2:25:50 PM	BCl3 MFC set to  0.000000
7/25/2010	2:25:50 PM	PHl3 MFC set to  0.000000
7/25/2010	2:25:50 PM	SiCl4 MFC set to  0.000000
7/25/2010	2:25:50 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	2:25:50 PM	Tube furnace set to 0
7/25/2010	2:25:56 PM	Helium valve closed
7/25/2010	2:25:56 PM	H2 valve closed
7/25/2010	2:25:56 PM	BCl3 valve closed
7/25/2010	2:25:56 PM	PH3 valve closed
7/25/2010	2:25:56 PM	SiCl4 pre valve closed
7/25/2010	2:25:56 PM	SiCl4 post valve closed
7/25/2010	2:25:56 PM	Main Vac valve closed
7/25/2010	2:25:56 PM	Bypass valve closed
7/25/2010	2:25:56 PM	Bubbler valve closed
7/25/2010	2:25:56 PM	Helium MFC set to  0.000000
7/25/2010	2:25:56 PM	H2 MFC set to  0.000000
7/25/2010	2:25:56 PM	BCl3 MFC set to  0.000000
7/25/2010	2:25:56 PM	PHl3 MFC set to  0.000000
7/25/2010	2:25:56 PM	SiCl4 MFC set to  0.000000
7/25/2010	2:25:56 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	2:25:56 PM	Tube furnace set to 0
7/25/2010	2:25:57 PM	Run finished at 2:25 PM
7/25/2010	2:25:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2010	2:35:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	2:35:40 PM	Recipe started at 2:35 PM
7/25/2010	2:35:40 PM	Helium valve closed
7/25/2010	2:35:40 PM	H2 valve closed
7/25/2010	2:35:40 PM	BCl3 valve closed
7/25/2010	2:35:40 PM	PH3 valve closed
7/25/2010	2:35:40 PM	SiCl4 pre valve closed
7/25/2010	2:35:40 PM	SiCl4 post valve closed
7/25/2010	2:35:40 PM	Main Vac valve closed
7/25/2010	2:35:40 PM	Bubbler valve closed
7/25/2010	2:35:40 PM	Bypass valve opened
7/25/2010	2:35:40 PM	Helium MFC set to  0.000000
7/25/2010	2:35:40 PM	H2 MFC set to  0.000000
7/25/2010	2:35:40 PM	BCl3 MFC set to  0.000000
7/25/2010	2:35:40 PM	PHl3 MFC set to  0.000000
7/25/2010	2:35:40 PM	SiCl4 MFC set to  0.000000
7/25/2010	2:35:40 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	2:35:40 PM	Tube furnace set to 0
7/25/2010	2:36:17 PM	Helium valve closed
7/25/2010	2:36:17 PM	H2 valve closed
7/25/2010	2:36:17 PM	BCl3 valve closed
7/25/2010	2:36:17 PM	PH3 valve closed
7/25/2010	2:36:17 PM	SiCl4 pre valve closed
7/25/2010	2:36:17 PM	SiCl4 post valve closed
7/25/2010	2:36:17 PM	Bubbler valve closed
7/25/2010	2:36:17 PM	Main Vac valve opened
7/25/2010	2:36:17 PM	Bypass valve opened
7/25/2010	2:36:17 PM	Helium MFC set to  0.000000
7/25/2010	2:36:17 PM	H2 MFC set to  0.000000
7/25/2010	2:36:17 PM	BCl3 MFC set to  0.000000
7/25/2010	2:36:17 PM	PHl3 MFC set to  0.000000
7/25/2010	2:36:17 PM	SiCl4 MFC set to  0.000000
7/25/2010	2:36:17 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	2:36:17 PM	Tube furnace set to 0
7/25/2010	2:36:17 PM	Run finished at 2:36 PM
7/25/2010	2:36:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	2:37:13 PM	Recipe started at 2:37 PM
7/25/2010	2:37:13 PM	Helium valve closed
7/25/2010	2:37:13 PM	H2 valve closed
7/25/2010	2:37:13 PM	BCl3 valve closed
7/25/2010	2:37:13 PM	PH3 valve closed
7/25/2010	2:37:13 PM	SiCl4 pre valve closed
7/25/2010	2:37:13 PM	SiCl4 post valve closed
7/25/2010	2:37:13 PM	Main Vac valve closed
7/25/2010	2:37:13 PM	Bubbler valve closed
7/25/2010	2:37:13 PM	Bypass valve opened
7/25/2010	2:37:13 PM	Helium MFC set to  0.000000
7/25/2010	2:37:13 PM	H2 MFC set to  0.000000
7/25/2010	2:37:13 PM	BCl3 MFC set to  0.000000
7/25/2010	2:37:13 PM	PHl3 MFC set to  0.000000
7/25/2010	2:37:13 PM	SiCl4 MFC set to  0.000000
7/25/2010	2:37:13 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	2:37:13 PM	Tube furnace set to 0
7/25/2010	2:37:13 PM	Helium valve closed
7/25/2010	2:37:13 PM	H2 valve closed
7/25/2010	2:37:13 PM	BCl3 valve closed
7/25/2010	2:37:13 PM	PH3 valve closed
7/25/2010	2:37:13 PM	SiCl4 pre valve closed
7/25/2010	2:37:13 PM	SiCl4 post valve closed
7/25/2010	2:37:13 PM	Bubbler valve closed
7/25/2010	2:37:13 PM	Main Vac valve opened
7/25/2010	2:37:13 PM	Bypass valve opened
7/25/2010	2:37:13 PM	Helium MFC set to  0.000000
7/25/2010	2:37:13 PM	H2 MFC set to  0.000000
7/25/2010	2:37:13 PM	BCl3 MFC set to  0.000000
7/25/2010	2:37:13 PM	PHl3 MFC set to  0.000000
7/25/2010	2:37:13 PM	SiCl4 MFC set to  0.000000
7/25/2010	2:37:13 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	2:37:13 PM	Tube furnace set to 0
7/25/2010	2:38:14 PM	H2 valve closed
7/25/2010	2:38:14 PM	BCl3 valve closed
7/25/2010	2:38:14 PM	PH3 valve closed
7/25/2010	2:38:14 PM	SiCl4 pre valve closed
7/25/2010	2:38:14 PM	SiCl4 post valve closed
7/25/2010	2:38:14 PM	Bubbler valve closed
7/25/2010	2:38:14 PM	Helium valve opened
7/25/2010	2:38:14 PM	Main Vac valve opened
7/25/2010	2:38:14 PM	Bypass valve opened
7/25/2010	2:38:14 PM	Helium MFC set to  100.000000
7/25/2010	2:38:14 PM	H2 MFC set to  0.000000
7/25/2010	2:38:14 PM	BCl3 MFC set to  0.000000
7/25/2010	2:38:14 PM	PHl3 MFC set to  0.000000
7/25/2010	2:38:14 PM	SiCl4 MFC set to  0.000000
7/25/2010	2:38:14 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	2:38:14 PM	Tube furnace set to 0
7/25/2010	2:47:14 PM	Helium valve closed
7/25/2010	2:47:14 PM	H2 valve closed
7/25/2010	2:47:14 PM	BCl3 valve closed
7/25/2010	2:47:14 PM	PH3 valve closed
7/25/2010	2:47:14 PM	SiCl4 pre valve closed
7/25/2010	2:47:14 PM	SiCl4 post valve closed
7/25/2010	2:47:14 PM	Bubbler valve closed
7/25/2010	2:47:14 PM	Main Vac valve opened
7/25/2010	2:47:14 PM	Bypass valve opened
7/25/2010	2:47:14 PM	Helium MFC set to  0.000000
7/25/2010	2:47:14 PM	H2 MFC set to  0.000000
7/25/2010	2:47:14 PM	BCl3 MFC set to  0.000000
7/25/2010	2:47:14 PM	PHl3 MFC set to  0.000000
7/25/2010	2:47:14 PM	SiCl4 MFC set to  0.000000
7/25/2010	2:47:14 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	2:47:14 PM	Tube furnace set to 0
7/25/2010	2:48:14 PM	H2 valve closed
7/25/2010	2:48:14 PM	BCl3 valve closed
7/25/2010	2:48:14 PM	PH3 valve closed
7/25/2010	2:48:14 PM	SiCl4 pre valve closed
7/25/2010	2:48:14 PM	SiCl4 post valve closed
7/25/2010	2:48:14 PM	Bubbler valve closed
7/25/2010	2:48:14 PM	Helium valve opened
7/25/2010	2:48:14 PM	Main Vac valve opened
7/25/2010	2:48:14 PM	Bypass valve opened
7/25/2010	2:48:14 PM	Helium MFC set to  100.000000
7/25/2010	2:48:14 PM	H2 MFC set to  0.000000
7/25/2010	2:48:14 PM	BCl3 MFC set to  0.000000
7/25/2010	2:48:14 PM	PHl3 MFC set to  0.000000
7/25/2010	2:48:14 PM	SiCl4 MFC set to  0.000000
7/25/2010	2:48:14 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	2:48:14 PM	Tube furnace set to 0
7/25/2010	2:57:14 PM	Helium valve closed
7/25/2010	2:57:14 PM	H2 valve closed
7/25/2010	2:57:14 PM	BCl3 valve closed
7/25/2010	2:57:14 PM	PH3 valve closed
7/25/2010	2:57:14 PM	SiCl4 pre valve closed
7/25/2010	2:57:14 PM	SiCl4 post valve closed
7/25/2010	2:57:14 PM	Bubbler valve closed
7/25/2010	2:57:14 PM	Main Vac valve opened
7/25/2010	2:57:14 PM	Bypass valve opened
7/25/2010	2:57:14 PM	Helium MFC set to  0.000000
7/25/2010	2:57:14 PM	H2 MFC set to  0.000000
7/25/2010	2:57:14 PM	BCl3 MFC set to  0.000000
7/25/2010	2:57:14 PM	PHl3 MFC set to  0.000000
7/25/2010	2:57:14 PM	SiCl4 MFC set to  0.000000
7/25/2010	2:57:14 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	2:57:14 PM	Tube furnace set to 0
7/25/2010	2:58:14 PM	H2 valve closed
7/25/2010	2:58:14 PM	BCl3 valve closed
7/25/2010	2:58:14 PM	PH3 valve closed
7/25/2010	2:58:14 PM	SiCl4 pre valve closed
7/25/2010	2:58:14 PM	SiCl4 post valve closed
7/25/2010	2:58:14 PM	Bubbler valve closed
7/25/2010	2:58:14 PM	Helium valve opened
7/25/2010	2:58:14 PM	Main Vac valve opened
7/25/2010	2:58:14 PM	Bypass valve opened
7/25/2010	2:58:14 PM	Helium MFC set to  100.000000
7/25/2010	2:58:14 PM	H2 MFC set to  0.000000
7/25/2010	2:58:14 PM	BCl3 MFC set to  0.000000
7/25/2010	2:58:14 PM	PHl3 MFC set to  0.000000
7/25/2010	2:58:14 PM	SiCl4 MFC set to  0.000000
7/25/2010	2:58:14 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	2:58:14 PM	Tube furnace set to 0
7/25/2010	3:07:14 PM	Helium valve closed
7/25/2010	3:07:14 PM	H2 valve closed
7/25/2010	3:07:14 PM	BCl3 valve closed
7/25/2010	3:07:14 PM	PH3 valve closed
7/25/2010	3:07:14 PM	SiCl4 pre valve closed
7/25/2010	3:07:14 PM	SiCl4 post valve closed
7/25/2010	3:07:14 PM	Bubbler valve closed
7/25/2010	3:07:14 PM	Main Vac valve opened
7/25/2010	3:07:14 PM	Bypass valve opened
7/25/2010	3:07:14 PM	Helium MFC set to  0.000000
7/25/2010	3:07:14 PM	H2 MFC set to  0.000000
7/25/2010	3:07:14 PM	BCl3 MFC set to  0.000000
7/25/2010	3:07:14 PM	PHl3 MFC set to  0.000000
7/25/2010	3:07:14 PM	SiCl4 MFC set to  0.000000
7/25/2010	3:07:14 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	3:07:15 PM	Tube furnace set to 0
7/25/2010	3:08:15 PM	H2 valve closed
7/25/2010	3:08:15 PM	BCl3 valve closed
7/25/2010	3:08:15 PM	PH3 valve closed
7/25/2010	3:08:15 PM	SiCl4 pre valve closed
7/25/2010	3:08:15 PM	SiCl4 post valve closed
7/25/2010	3:08:15 PM	Bubbler valve closed
7/25/2010	3:08:15 PM	Helium valve opened
7/25/2010	3:08:15 PM	Main Vac valve opened
7/25/2010	3:08:15 PM	Bypass valve opened
7/25/2010	3:08:15 PM	Helium MFC set to  100.000000
7/25/2010	3:08:15 PM	H2 MFC set to  0.000000
7/25/2010	3:08:15 PM	BCl3 MFC set to  0.000000
7/25/2010	3:08:15 PM	PHl3 MFC set to  0.000000
7/25/2010	3:08:15 PM	SiCl4 MFC set to  0.000000
7/25/2010	3:08:15 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	3:08:15 PM	Tube furnace set to 0
7/25/2010	3:17:15 PM	Helium valve closed
7/25/2010	3:17:15 PM	H2 valve closed
7/25/2010	3:17:15 PM	BCl3 valve closed
7/25/2010	3:17:15 PM	PH3 valve closed
7/25/2010	3:17:15 PM	SiCl4 pre valve closed
7/25/2010	3:17:15 PM	SiCl4 post valve closed
7/25/2010	3:17:15 PM	Bubbler valve closed
7/25/2010	3:17:15 PM	Main Vac valve opened
7/25/2010	3:17:15 PM	Bypass valve opened
7/25/2010	3:17:15 PM	Helium MFC set to  0.000000
7/25/2010	3:17:15 PM	H2 MFC set to  0.000000
7/25/2010	3:17:15 PM	BCl3 MFC set to  0.000000
7/25/2010	3:17:15 PM	PHl3 MFC set to  0.000000
7/25/2010	3:17:15 PM	SiCl4 MFC set to  0.000000
7/25/2010	3:17:15 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	3:17:15 PM	Tube furnace set to 0
7/25/2010	3:18:15 PM	H2 valve closed
7/25/2010	3:18:15 PM	BCl3 valve closed
7/25/2010	3:18:15 PM	PH3 valve closed
7/25/2010	3:18:15 PM	SiCl4 pre valve closed
7/25/2010	3:18:15 PM	SiCl4 post valve closed
7/25/2010	3:18:15 PM	Bubbler valve closed
7/25/2010	3:18:15 PM	Helium valve opened
7/25/2010	3:18:15 PM	Main Vac valve opened
7/25/2010	3:18:15 PM	Bypass valve opened
7/25/2010	3:18:15 PM	Helium MFC set to  100.000000
7/25/2010	3:18:15 PM	H2 MFC set to  0.000000
7/25/2010	3:18:15 PM	BCl3 MFC set to  0.000000
7/25/2010	3:18:15 PM	PHl3 MFC set to  0.000000
7/25/2010	3:18:15 PM	SiCl4 MFC set to  0.000000
7/25/2010	3:18:15 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	3:18:15 PM	Tube furnace set to 0
7/25/2010	3:27:15 PM	Helium valve closed
7/25/2010	3:27:15 PM	H2 valve closed
7/25/2010	3:27:15 PM	BCl3 valve closed
7/25/2010	3:27:15 PM	PH3 valve closed
7/25/2010	3:27:15 PM	SiCl4 pre valve closed
7/25/2010	3:27:15 PM	SiCl4 post valve closed
7/25/2010	3:27:15 PM	Bubbler valve closed
7/25/2010	3:27:15 PM	Main Vac valve opened
7/25/2010	3:27:15 PM	Bypass valve opened
7/25/2010	3:27:15 PM	Helium MFC set to  0.000000
7/25/2010	3:27:15 PM	H2 MFC set to  0.000000
7/25/2010	3:27:15 PM	BCl3 MFC set to  0.000000
7/25/2010	3:27:15 PM	PHl3 MFC set to  0.000000
7/25/2010	3:27:15 PM	SiCl4 MFC set to  0.000000
7/25/2010	3:27:15 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	3:27:15 PM	Tube furnace set to 0
7/25/2010	3:27:16 PM	Run finished at 3:27 PM
7/25/2010	3:59:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/25/2010	3:59:22 PM	Recipe started at 3:59 PM
7/25/2010	3:59:22 PM	Helium valve closed
7/25/2010	3:59:22 PM	H2 valve closed
7/25/2010	3:59:22 PM	BCl3 valve closed
7/25/2010	3:59:22 PM	PH3 valve closed
7/25/2010	3:59:22 PM	SiCl4 pre valve closed
7/25/2010	3:59:22 PM	SiCl4 post valve closed
7/25/2010	3:59:22 PM	Main Vac valve closed
7/25/2010	3:59:22 PM	Bypass valve closed
7/25/2010	3:59:22 PM	Bubbler valve closed
7/25/2010	3:59:22 PM	Helium MFC set to  0.000000
7/25/2010	3:59:22 PM	H2 MFC set to  0.000000
7/25/2010	3:59:22 PM	BCl3 MFC set to  0.000000
7/25/2010	3:59:22 PM	PHl3 MFC set to  0.000000
7/25/2010	3:59:22 PM	SiCl4 MFC set to  0.000000
7/25/2010	3:59:22 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	3:59:22 PM	Tube furnace set to 0
7/25/2010	3:59:23 PM	Run finished at 3:59 PM
7/25/2010	3:59:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
7/25/2010	3:59:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	3:59:34 PM	Recipe started at 3:59 PM
7/25/2010	3:59:34 PM	Helium valve closed
7/25/2010	3:59:34 PM	H2 valve closed
7/25/2010	3:59:34 PM	BCl3 valve closed
7/25/2010	3:59:34 PM	PH3 valve closed
7/25/2010	3:59:34 PM	SiCl4 pre valve closed
7/25/2010	3:59:34 PM	SiCl4 post valve closed
7/25/2010	3:59:34 PM	Main Vac valve closed
7/25/2010	3:59:34 PM	Bubbler valve closed
7/25/2010	3:59:34 PM	Bypass valve opened
7/25/2010	3:59:34 PM	Helium MFC set to  0.000000
7/25/2010	3:59:34 PM	H2 MFC set to  0.000000
7/25/2010	3:59:34 PM	BCl3 MFC set to  0.000000
7/25/2010	3:59:34 PM	PHl3 MFC set to  0.000000
7/25/2010	3:59:34 PM	SiCl4 MFC set to  0.000000
7/25/2010	3:59:34 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	3:59:34 PM	Tube furnace set to 0
7/25/2010	3:59:35 PM	Helium valve closed
7/25/2010	3:59:35 PM	H2 valve closed
7/25/2010	3:59:35 PM	BCl3 valve closed
7/25/2010	3:59:35 PM	PH3 valve closed
7/25/2010	3:59:35 PM	SiCl4 pre valve closed
7/25/2010	3:59:35 PM	SiCl4 post valve closed
7/25/2010	3:59:35 PM	Bubbler valve closed
7/25/2010	3:59:35 PM	Main Vac valve opened
7/25/2010	3:59:35 PM	Bypass valve opened
7/25/2010	3:59:35 PM	Helium MFC set to  0.000000
7/25/2010	3:59:35 PM	H2 MFC set to  0.000000
7/25/2010	3:59:35 PM	BCl3 MFC set to  0.000000
7/25/2010	3:59:35 PM	PHl3 MFC set to  0.000000
7/25/2010	3:59:35 PM	SiCl4 MFC set to  0.000000
7/25/2010	3:59:35 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	3:59:35 PM	Tube furnace set to 0
7/25/2010	3:59:35 PM	Run finished at 3:59 PM
7/25/2010	3:59:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	3:59:48 PM	Recipe started at 3:59 PM
7/25/2010	3:59:48 PM	Helium valve closed
7/25/2010	3:59:48 PM	H2 valve closed
7/25/2010	3:59:48 PM	BCl3 valve closed
7/25/2010	3:59:48 PM	PH3 valve closed
7/25/2010	3:59:48 PM	SiCl4 pre valve closed
7/25/2010	3:59:48 PM	SiCl4 post valve closed
7/25/2010	3:59:48 PM	Main Vac valve closed
7/25/2010	3:59:48 PM	Bubbler valve closed
7/25/2010	3:59:48 PM	Bypass valve opened
7/25/2010	3:59:48 PM	Helium MFC set to  0.000000
7/25/2010	3:59:48 PM	H2 MFC set to  0.000000
7/25/2010	3:59:48 PM	BCl3 MFC set to  0.000000
7/25/2010	3:59:48 PM	PHl3 MFC set to  0.000000
7/25/2010	3:59:48 PM	SiCl4 MFC set to  0.000000
7/25/2010	3:59:48 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	3:59:48 PM	Tube furnace set to 0
7/25/2010	3:59:48 PM	Helium valve closed
7/25/2010	3:59:48 PM	H2 valve closed
7/25/2010	3:59:48 PM	BCl3 valve closed
7/25/2010	3:59:48 PM	PH3 valve closed
7/25/2010	3:59:48 PM	SiCl4 pre valve closed
7/25/2010	3:59:48 PM	SiCl4 post valve closed
7/25/2010	3:59:48 PM	Bubbler valve closed
7/25/2010	3:59:48 PM	Main Vac valve opened
7/25/2010	3:59:48 PM	Bypass valve opened
7/25/2010	3:59:48 PM	Helium MFC set to  0.000000
7/25/2010	3:59:48 PM	H2 MFC set to  0.000000
7/25/2010	3:59:48 PM	BCl3 MFC set to  0.000000
7/25/2010	3:59:48 PM	PHl3 MFC set to  0.000000
7/25/2010	3:59:48 PM	SiCl4 MFC set to  0.000000
7/25/2010	3:59:48 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	3:59:48 PM	Tube furnace set to 0
7/25/2010	4:00:48 PM	H2 valve closed
7/25/2010	4:00:48 PM	BCl3 valve closed
7/25/2010	4:00:48 PM	PH3 valve closed
7/25/2010	4:00:48 PM	SiCl4 pre valve closed
7/25/2010	4:00:48 PM	SiCl4 post valve closed
7/25/2010	4:00:48 PM	Bubbler valve closed
7/25/2010	4:00:48 PM	Helium valve opened
7/25/2010	4:00:48 PM	Main Vac valve opened
7/25/2010	4:00:48 PM	Bypass valve opened
7/25/2010	4:00:48 PM	Helium MFC set to  100.000000
7/25/2010	4:00:48 PM	H2 MFC set to  0.000000
7/25/2010	4:00:48 PM	BCl3 MFC set to  0.000000
7/25/2010	4:00:48 PM	PHl3 MFC set to  0.000000
7/25/2010	4:00:48 PM	SiCl4 MFC set to  0.000000
7/25/2010	4:00:48 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	4:00:49 PM	Tube furnace set to 0
7/25/2010	4:09:49 PM	Helium valve closed
7/25/2010	4:09:49 PM	H2 valve closed
7/25/2010	4:09:49 PM	BCl3 valve closed
7/25/2010	4:09:49 PM	PH3 valve closed
7/25/2010	4:09:49 PM	SiCl4 pre valve closed
7/25/2010	4:09:49 PM	SiCl4 post valve closed
7/25/2010	4:09:49 PM	Bubbler valve closed
7/25/2010	4:09:49 PM	Main Vac valve opened
7/25/2010	4:09:49 PM	Bypass valve opened
7/25/2010	4:09:49 PM	Helium MFC set to  0.000000
7/25/2010	4:09:49 PM	H2 MFC set to  0.000000
7/25/2010	4:09:49 PM	BCl3 MFC set to  0.000000
7/25/2010	4:09:49 PM	PHl3 MFC set to  0.000000
7/25/2010	4:09:49 PM	SiCl4 MFC set to  0.000000
7/25/2010	4:09:49 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	4:09:49 PM	Tube furnace set to 0
7/25/2010	4:10:49 PM	H2 valve closed
7/25/2010	4:10:49 PM	BCl3 valve closed
7/25/2010	4:10:49 PM	PH3 valve closed
7/25/2010	4:10:49 PM	SiCl4 pre valve closed
7/25/2010	4:10:49 PM	SiCl4 post valve closed
7/25/2010	4:10:49 PM	Bubbler valve closed
7/25/2010	4:10:49 PM	Helium valve opened
7/25/2010	4:10:49 PM	Main Vac valve opened
7/25/2010	4:10:49 PM	Bypass valve opened
7/25/2010	4:10:49 PM	Helium MFC set to  100.000000
7/25/2010	4:10:49 PM	H2 MFC set to  0.000000
7/25/2010	4:10:49 PM	BCl3 MFC set to  0.000000
7/25/2010	4:10:49 PM	PHl3 MFC set to  0.000000
7/25/2010	4:10:49 PM	SiCl4 MFC set to  0.000000
7/25/2010	4:10:49 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	4:10:49 PM	Tube furnace set to 0
7/25/2010	4:19:49 PM	Helium valve closed
7/25/2010	4:19:49 PM	H2 valve closed
7/25/2010	4:19:49 PM	BCl3 valve closed
7/25/2010	4:19:49 PM	PH3 valve closed
7/25/2010	4:19:49 PM	SiCl4 pre valve closed
7/25/2010	4:19:49 PM	SiCl4 post valve closed
7/25/2010	4:19:49 PM	Bubbler valve closed
7/25/2010	4:19:49 PM	Main Vac valve opened
7/25/2010	4:19:49 PM	Bypass valve opened
7/25/2010	4:19:49 PM	Helium MFC set to  0.000000
7/25/2010	4:19:49 PM	H2 MFC set to  0.000000
7/25/2010	4:19:49 PM	BCl3 MFC set to  0.000000
7/25/2010	4:19:49 PM	PHl3 MFC set to  0.000000
7/25/2010	4:19:49 PM	SiCl4 MFC set to  0.000000
7/25/2010	4:19:49 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	4:19:49 PM	Tube furnace set to 0
7/25/2010	4:20:25 PM	Run aborted at 4:20 PM
7/25/2010	4:20:25 PM	Helium valve closed
7/25/2010	4:20:25 PM	H2 valve closed
7/25/2010	4:20:25 PM	BCl3 valve closed
7/25/2010	4:20:25 PM	PH3 valve closed
7/25/2010	4:20:25 PM	SiCl4 pre valve closed
7/25/2010	4:20:25 PM	SiCl4 post valve closed
7/25/2010	4:20:25 PM	Bypass valve closed
7/25/2010	4:20:25 PM	Main Vac valve closed
7/25/2010	4:20:25 PM	Bubbler valve closed
7/25/2010	4:20:25 PM	Helium MFC set to  0.000000
7/25/2010	4:20:25 PM	H2 MFC set to  0.000000
7/25/2010	4:20:25 PM	BCl3 MFC set to  0.000000
7/25/2010	4:20:25 PM	PHl3 MFC set to  0.000000
7/25/2010	4:20:25 PM	SiCl4 MFC set to  0.000000
7/25/2010	4:20:25 PM	Tube furnace set to 0
7/25/2010	4:20:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	4:20:27 PM	Recipe started at 4:20 PM
7/25/2010	4:20:27 PM	Helium valve closed
7/25/2010	4:20:27 PM	H2 valve closed
7/25/2010	4:20:27 PM	BCl3 valve closed
7/25/2010	4:20:27 PM	PH3 valve closed
7/25/2010	4:20:27 PM	SiCl4 pre valve closed
7/25/2010	4:20:27 PM	SiCl4 post valve closed
7/25/2010	4:20:27 PM	Main Vac valve closed
7/25/2010	4:20:27 PM	Bubbler valve closed
7/25/2010	4:20:27 PM	Bypass valve opened
7/25/2010	4:20:27 PM	Helium MFC set to  0.000000
7/25/2010	4:20:27 PM	H2 MFC set to  0.000000
7/25/2010	4:20:27 PM	BCl3 MFC set to  0.000000
7/25/2010	4:20:27 PM	PHl3 MFC set to  0.000000
7/25/2010	4:20:27 PM	SiCl4 MFC set to  0.000000
7/25/2010	4:20:27 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	4:20:28 PM	Tube furnace set to 0
7/25/2010	4:20:28 PM	Helium valve closed
7/25/2010	4:20:28 PM	H2 valve closed
7/25/2010	4:20:28 PM	BCl3 valve closed
7/25/2010	4:20:28 PM	PH3 valve closed
7/25/2010	4:20:28 PM	SiCl4 pre valve closed
7/25/2010	4:20:28 PM	SiCl4 post valve closed
7/25/2010	4:20:28 PM	Bubbler valve closed
7/25/2010	4:20:28 PM	Main Vac valve opened
7/25/2010	4:20:28 PM	Bypass valve opened
7/25/2010	4:20:28 PM	Helium MFC set to  0.000000
7/25/2010	4:20:28 PM	H2 MFC set to  0.000000
7/25/2010	4:20:28 PM	BCl3 MFC set to  0.000000
7/25/2010	4:20:28 PM	PHl3 MFC set to  0.000000
7/25/2010	4:20:28 PM	SiCl4 MFC set to  0.000000
7/25/2010	4:20:28 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	4:20:28 PM	Tube furnace set to 0
7/25/2010	4:20:28 PM	Run finished at 4:20 PM
7/25/2010	4:20:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	4:21:24 PM	Recipe started at 4:21 PM
7/25/2010	4:21:24 PM	Helium valve closed
7/25/2010	4:21:24 PM	BCl3 valve closed
7/25/2010	4:21:24 PM	PH3 valve closed
7/25/2010	4:21:24 PM	SiCl4 pre valve closed
7/25/2010	4:21:24 PM	SiCl4 post valve closed
7/25/2010	4:21:24 PM	Main Vac valve closed
7/25/2010	4:21:24 PM	Bypass valve closed
7/25/2010	4:21:24 PM	Bubbler valve closed
7/25/2010	4:21:24 PM	H2 valve opened
7/25/2010	4:21:24 PM	Helium MFC set to  0.000000
7/25/2010	4:21:24 PM	H2 MFC set to  500.000000
7/25/2010	4:21:24 PM	BCl3 MFC set to  0.000000
7/25/2010	4:21:24 PM	PHl3 MFC set to  0.000000
7/25/2010	4:21:24 PM	SiCl4 MFC set to  0.000000
7/25/2010	4:21:24 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	4:21:24 PM	Tube furnace set to 0
7/25/2010	4:22:46 PM	Helium valve closed
7/25/2010	4:22:46 PM	BCl3 valve closed
7/25/2010	4:22:46 PM	PH3 valve closed
7/25/2010	4:22:46 PM	SiCl4 pre valve closed
7/25/2010	4:22:46 PM	SiCl4 post valve closed
7/25/2010	4:22:46 PM	Main Vac valve closed
7/25/2010	4:22:46 PM	Bypass valve closed
7/25/2010	4:22:46 PM	H2 valve opened
7/25/2010	4:22:46 PM	Bubbler valve opened
7/25/2010	4:22:46 PM	Helium MFC set to  0.000000
7/25/2010	4:22:46 PM	H2 MFC set to  500.000000
7/25/2010	4:22:46 PM	BCl3 MFC set to  0.000000
7/25/2010	4:22:46 PM	PHl3 MFC set to  0.000000
7/25/2010	4:22:46 PM	SiCl4 MFC set to  0.000000
7/25/2010	4:22:46 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	4:22:46 PM	Tube furnace set to 1000
7/25/2010	4:42:46 PM	Helium valve closed
7/25/2010	4:42:46 PM	PH3 valve closed
7/25/2010	4:42:46 PM	Main Vac valve closed
7/25/2010	4:42:46 PM	Bypass valve closed
7/25/2010	4:42:46 PM	H2 valve opened
7/25/2010	4:42:46 PM	BCl3 valve opened
7/25/2010	4:42:46 PM	SiCl4 pre valve opened
7/25/2010	4:42:46 PM	SiCl4 post valve opened
7/25/2010	4:42:46 PM	Bubbler valve opened
7/25/2010	4:42:46 PM	Helium MFC set to  0.000000
7/25/2010	4:42:46 PM	H2 MFC set to  500.000000
7/25/2010	4:42:46 PM	BCl3 MFC set to  6.000000
7/25/2010	4:42:46 PM	PHl3 MFC set to  0.000000
7/25/2010	4:42:46 PM	SiCl4 MFC set to  50.000000
7/25/2010	4:42:46 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	4:42:46 PM	Tube furnace set to 1000
7/25/2010	4:57:46 PM	H2 valve closed
7/25/2010	4:57:46 PM	BCl3 valve closed
7/25/2010	4:57:46 PM	PH3 valve closed
7/25/2010	4:57:46 PM	SiCl4 pre valve closed
7/25/2010	4:57:46 PM	SiCl4 post valve closed
7/25/2010	4:57:46 PM	Main Vac valve closed
7/25/2010	4:57:46 PM	Bypass valve closed
7/25/2010	4:57:46 PM	Helium valve opened
7/25/2010	4:57:46 PM	Bubbler valve opened
7/25/2010	4:57:46 PM	Helium MFC set to  500.000000
7/25/2010	4:57:46 PM	H2 MFC set to  0.000000
7/25/2010	4:57:46 PM	BCl3 MFC set to  0.000000
7/25/2010	4:57:46 PM	PHl3 MFC set to  0.000000
7/25/2010	4:57:46 PM	SiCl4 MFC set to  0.000000
7/25/2010	4:57:46 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	4:57:47 PM	Tube furnace set to 0
7/25/2010	5:17:47 PM	Helium valve closed
7/25/2010	5:17:47 PM	H2 valve closed
7/25/2010	5:17:47 PM	BCl3 valve closed
7/25/2010	5:17:47 PM	PH3 valve closed
7/25/2010	5:17:47 PM	SiCl4 pre valve closed
7/25/2010	5:17:47 PM	SiCl4 post valve closed
7/25/2010	5:17:47 PM	Main Vac valve closed
7/25/2010	5:17:47 PM	Bypass valve closed
7/25/2010	5:17:47 PM	Bubbler valve closed
7/25/2010	5:17:47 PM	Helium MFC set to  0.000000
7/25/2010	5:17:47 PM	H2 MFC set to  0.000000
7/25/2010	5:17:47 PM	BCl3 MFC set to  0.000000
7/25/2010	5:17:47 PM	PHl3 MFC set to  0.000000
7/25/2010	5:17:47 PM	SiCl4 MFC set to  0.000000
7/25/2010	5:17:47 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	5:17:47 PM	Tube furnace set to 0
7/25/2010	5:17:47 PM	Run finished at 5:17 PM
7/25/2010	5:24:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2010	5:24:18 PM	Recipe started at 5:24 PM
7/25/2010	5:24:18 PM	H2 valve closed
7/25/2010	5:24:18 PM	BCl3 valve closed
7/25/2010	5:24:18 PM	PH3 valve closed
7/25/2010	5:24:18 PM	SiCl4 pre valve closed
7/25/2010	5:24:18 PM	SiCl4 post valve closed
7/25/2010	5:24:18 PM	Main Vac valve closed
7/25/2010	5:24:18 PM	Bypass valve closed
7/25/2010	5:24:18 PM	Bubbler valve closed
7/25/2010	5:24:18 PM	Helium valve opened
7/25/2010	5:24:18 PM	Helium MFC set to  500.000000
7/25/2010	5:24:18 PM	H2 MFC set to  0.000000
7/25/2010	5:24:18 PM	BCl3 MFC set to  0.000000
7/25/2010	5:24:18 PM	PHl3 MFC set to  0.000000
7/25/2010	5:24:18 PM	SiCl4 MFC set to  0.000000
7/25/2010	5:24:18 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	5:24:18 PM	Tube furnace set to 0
7/25/2010	5:24:22 PM	Helium valve closed
7/25/2010	5:24:22 PM	H2 valve closed
7/25/2010	5:24:22 PM	BCl3 valve closed
7/25/2010	5:24:22 PM	PH3 valve closed
7/25/2010	5:24:22 PM	SiCl4 pre valve closed
7/25/2010	5:24:22 PM	SiCl4 post valve closed
7/25/2010	5:24:22 PM	Main Vac valve closed
7/25/2010	5:24:22 PM	Bypass valve closed
7/25/2010	5:24:22 PM	Bubbler valve closed
7/25/2010	5:24:22 PM	Helium MFC set to  0.000000
7/25/2010	5:24:22 PM	H2 MFC set to  0.000000
7/25/2010	5:24:22 PM	BCl3 MFC set to  0.000000
7/25/2010	5:24:22 PM	PHl3 MFC set to  0.000000
7/25/2010	5:24:22 PM	SiCl4 MFC set to  0.000000
7/25/2010	5:24:22 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	5:24:22 PM	Tube furnace set to 0
7/25/2010	5:24:23 PM	Run finished at 5:24 PM
7/25/2010	5:24:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2010	5:34:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	5:34:58 PM	Recipe started at 5:34 PM
7/25/2010	5:34:58 PM	Helium valve closed
7/25/2010	5:34:58 PM	H2 valve closed
7/25/2010	5:34:58 PM	BCl3 valve closed
7/25/2010	5:34:58 PM	PH3 valve closed
7/25/2010	5:34:58 PM	SiCl4 pre valve closed
7/25/2010	5:34:58 PM	SiCl4 post valve closed
7/25/2010	5:34:58 PM	Main Vac valve closed
7/25/2010	5:34:58 PM	Bubbler valve closed
7/25/2010	5:34:58 PM	Bypass valve opened
7/25/2010	5:34:58 PM	Helium MFC set to  0.000000
7/25/2010	5:34:58 PM	H2 MFC set to  0.000000
7/25/2010	5:34:58 PM	BCl3 MFC set to  0.000000
7/25/2010	5:34:58 PM	PHl3 MFC set to  0.000000
7/25/2010	5:34:58 PM	SiCl4 MFC set to  0.000000
7/25/2010	5:34:58 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	5:34:58 PM	Tube furnace set to 0
7/25/2010	5:35:34 PM	Helium valve closed
7/25/2010	5:35:34 PM	H2 valve closed
7/25/2010	5:35:34 PM	BCl3 valve closed
7/25/2010	5:35:34 PM	PH3 valve closed
7/25/2010	5:35:34 PM	SiCl4 pre valve closed
7/25/2010	5:35:34 PM	SiCl4 post valve closed
7/25/2010	5:35:34 PM	Bubbler valve closed
7/25/2010	5:35:34 PM	Main Vac valve opened
7/25/2010	5:35:34 PM	Bypass valve opened
7/25/2010	5:35:34 PM	Helium MFC set to  0.000000
7/25/2010	5:35:34 PM	H2 MFC set to  0.000000
7/25/2010	5:35:34 PM	BCl3 MFC set to  0.000000
7/25/2010	5:35:34 PM	PHl3 MFC set to  0.000000
7/25/2010	5:35:34 PM	SiCl4 MFC set to  0.000000
7/25/2010	5:35:34 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	5:35:34 PM	Tube furnace set to 0
7/25/2010	5:35:35 PM	Run finished at 5:35 PM
7/25/2010	5:35:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	5:35:57 PM	Recipe started at 5:35 PM
7/25/2010	5:35:57 PM	Helium valve closed
7/25/2010	5:35:57 PM	H2 valve closed
7/25/2010	5:35:57 PM	BCl3 valve closed
7/25/2010	5:35:57 PM	PH3 valve closed
7/25/2010	5:35:57 PM	SiCl4 pre valve closed
7/25/2010	5:35:57 PM	SiCl4 post valve closed
7/25/2010	5:35:57 PM	Main Vac valve closed
7/25/2010	5:35:57 PM	Bubbler valve closed
7/25/2010	5:35:57 PM	Bypass valve opened
7/25/2010	5:35:57 PM	Helium MFC set to  0.000000
7/25/2010	5:35:57 PM	H2 MFC set to  0.000000
7/25/2010	5:35:57 PM	BCl3 MFC set to  0.000000
7/25/2010	5:35:57 PM	PHl3 MFC set to  0.000000
7/25/2010	5:35:57 PM	SiCl4 MFC set to  0.000000
7/25/2010	5:35:57 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	5:35:57 PM	Tube furnace set to 0
7/25/2010	5:35:58 PM	Helium valve closed
7/25/2010	5:35:58 PM	H2 valve closed
7/25/2010	5:35:58 PM	BCl3 valve closed
7/25/2010	5:35:58 PM	PH3 valve closed
7/25/2010	5:35:58 PM	SiCl4 pre valve closed
7/25/2010	5:35:58 PM	SiCl4 post valve closed
7/25/2010	5:35:58 PM	Bubbler valve closed
7/25/2010	5:35:58 PM	Main Vac valve opened
7/25/2010	5:35:58 PM	Bypass valve opened
7/25/2010	5:35:58 PM	Helium MFC set to  0.000000
7/25/2010	5:35:58 PM	H2 MFC set to  0.000000
7/25/2010	5:35:58 PM	BCl3 MFC set to  0.000000
7/25/2010	5:35:58 PM	PHl3 MFC set to  0.000000
7/25/2010	5:35:58 PM	SiCl4 MFC set to  0.000000
7/25/2010	5:35:58 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	5:35:58 PM	Tube furnace set to 0
7/25/2010	5:36:58 PM	H2 valve closed
7/25/2010	5:36:58 PM	BCl3 valve closed
7/25/2010	5:36:58 PM	PH3 valve closed
7/25/2010	5:36:58 PM	SiCl4 pre valve closed
7/25/2010	5:36:58 PM	SiCl4 post valve closed
7/25/2010	5:36:58 PM	Bubbler valve closed
7/25/2010	5:36:58 PM	Helium valve opened
7/25/2010	5:36:58 PM	Main Vac valve opened
7/25/2010	5:36:58 PM	Bypass valve opened
7/25/2010	5:36:58 PM	Helium MFC set to  100.000000
7/25/2010	5:36:58 PM	H2 MFC set to  0.000000
7/25/2010	5:36:58 PM	BCl3 MFC set to  0.000000
7/25/2010	5:36:58 PM	PHl3 MFC set to  0.000000
7/25/2010	5:36:58 PM	SiCl4 MFC set to  0.000000
7/25/2010	5:36:58 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	5:36:58 PM	Tube furnace set to 0
7/25/2010	5:45:58 PM	Helium valve closed
7/25/2010	5:45:58 PM	H2 valve closed
7/25/2010	5:45:58 PM	BCl3 valve closed
7/25/2010	5:45:58 PM	PH3 valve closed
7/25/2010	5:45:58 PM	SiCl4 pre valve closed
7/25/2010	5:45:58 PM	SiCl4 post valve closed
7/25/2010	5:45:58 PM	Bubbler valve closed
7/25/2010	5:45:58 PM	Main Vac valve opened
7/25/2010	5:45:58 PM	Bypass valve opened
7/25/2010	5:45:58 PM	Helium MFC set to  0.000000
7/25/2010	5:45:58 PM	H2 MFC set to  0.000000
7/25/2010	5:45:58 PM	BCl3 MFC set to  0.000000
7/25/2010	5:45:58 PM	PHl3 MFC set to  0.000000
7/25/2010	5:45:58 PM	SiCl4 MFC set to  0.000000
7/25/2010	5:45:58 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	5:45:58 PM	Tube furnace set to 0
7/25/2010	5:46:58 PM	H2 valve closed
7/25/2010	5:46:58 PM	BCl3 valve closed
7/25/2010	5:46:58 PM	PH3 valve closed
7/25/2010	5:46:58 PM	SiCl4 pre valve closed
7/25/2010	5:46:58 PM	SiCl4 post valve closed
7/25/2010	5:46:58 PM	Bubbler valve closed
7/25/2010	5:46:58 PM	Helium valve opened
7/25/2010	5:46:58 PM	Main Vac valve opened
7/25/2010	5:46:58 PM	Bypass valve opened
7/25/2010	5:46:58 PM	Helium MFC set to  100.000000
7/25/2010	5:46:58 PM	H2 MFC set to  0.000000
7/25/2010	5:46:58 PM	BCl3 MFC set to  0.000000
7/25/2010	5:46:58 PM	PHl3 MFC set to  0.000000
7/25/2010	5:46:58 PM	SiCl4 MFC set to  0.000000
7/25/2010	5:46:58 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	5:46:58 PM	Tube furnace set to 0
7/25/2010	5:55:58 PM	Helium valve closed
7/25/2010	5:55:58 PM	H2 valve closed
7/25/2010	5:55:58 PM	BCl3 valve closed
7/25/2010	5:55:58 PM	PH3 valve closed
7/25/2010	5:55:58 PM	SiCl4 pre valve closed
7/25/2010	5:55:58 PM	SiCl4 post valve closed
7/25/2010	5:55:58 PM	Bubbler valve closed
7/25/2010	5:55:58 PM	Main Vac valve opened
7/25/2010	5:55:58 PM	Bypass valve opened
7/25/2010	5:55:58 PM	Helium MFC set to  0.000000
7/25/2010	5:55:58 PM	H2 MFC set to  0.000000
7/25/2010	5:55:58 PM	BCl3 MFC set to  0.000000
7/25/2010	5:55:58 PM	PHl3 MFC set to  0.000000
7/25/2010	5:55:58 PM	SiCl4 MFC set to  0.000000
7/25/2010	5:55:58 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	5:55:59 PM	Tube furnace set to 0
7/25/2010	5:56:59 PM	H2 valve closed
7/25/2010	5:56:59 PM	BCl3 valve closed
7/25/2010	5:56:59 PM	PH3 valve closed
7/25/2010	5:56:59 PM	SiCl4 pre valve closed
7/25/2010	5:56:59 PM	SiCl4 post valve closed
7/25/2010	5:56:59 PM	Bubbler valve closed
7/25/2010	5:56:59 PM	Helium valve opened
7/25/2010	5:56:59 PM	Main Vac valve opened
7/25/2010	5:56:59 PM	Bypass valve opened
7/25/2010	5:56:59 PM	Helium MFC set to  100.000000
7/25/2010	5:56:59 PM	H2 MFC set to  0.000000
7/25/2010	5:56:59 PM	BCl3 MFC set to  0.000000
7/25/2010	5:56:59 PM	PHl3 MFC set to  0.000000
7/25/2010	5:56:59 PM	SiCl4 MFC set to  0.000000
7/25/2010	5:56:59 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	5:56:59 PM	Tube furnace set to 0
7/25/2010	6:05:59 PM	Helium valve closed
7/25/2010	6:05:59 PM	H2 valve closed
7/25/2010	6:05:59 PM	BCl3 valve closed
7/25/2010	6:05:59 PM	PH3 valve closed
7/25/2010	6:05:59 PM	SiCl4 pre valve closed
7/25/2010	6:05:59 PM	SiCl4 post valve closed
7/25/2010	6:05:59 PM	Bubbler valve closed
7/25/2010	6:05:59 PM	Main Vac valve opened
7/25/2010	6:05:59 PM	Bypass valve opened
7/25/2010	6:05:59 PM	Helium MFC set to  0.000000
7/25/2010	6:05:59 PM	H2 MFC set to  0.000000
7/25/2010	6:05:59 PM	BCl3 MFC set to  0.000000
7/25/2010	6:05:59 PM	PHl3 MFC set to  0.000000
7/25/2010	6:05:59 PM	SiCl4 MFC set to  0.000000
7/25/2010	6:05:59 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	6:05:59 PM	Tube furnace set to 0
7/25/2010	6:06:59 PM	H2 valve closed
7/25/2010	6:06:59 PM	BCl3 valve closed
7/25/2010	6:06:59 PM	PH3 valve closed
7/25/2010	6:06:59 PM	SiCl4 pre valve closed
7/25/2010	6:06:59 PM	SiCl4 post valve closed
7/25/2010	6:06:59 PM	Bubbler valve closed
7/25/2010	6:06:59 PM	Helium valve opened
7/25/2010	6:06:59 PM	Main Vac valve opened
7/25/2010	6:06:59 PM	Bypass valve opened
7/25/2010	6:06:59 PM	Helium MFC set to  100.000000
7/25/2010	6:06:59 PM	H2 MFC set to  0.000000
7/25/2010	6:06:59 PM	BCl3 MFC set to  0.000000
7/25/2010	6:06:59 PM	PHl3 MFC set to  0.000000
7/25/2010	6:06:59 PM	SiCl4 MFC set to  0.000000
7/25/2010	6:06:59 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	6:06:59 PM	Tube furnace set to 0
7/25/2010	6:15:59 PM	Helium valve closed
7/25/2010	6:15:59 PM	H2 valve closed
7/25/2010	6:15:59 PM	BCl3 valve closed
7/25/2010	6:15:59 PM	PH3 valve closed
7/25/2010	6:15:59 PM	SiCl4 pre valve closed
7/25/2010	6:15:59 PM	SiCl4 post valve closed
7/25/2010	6:15:59 PM	Bubbler valve closed
7/25/2010	6:15:59 PM	Main Vac valve opened
7/25/2010	6:15:59 PM	Bypass valve opened
7/25/2010	6:15:59 PM	Helium MFC set to  0.000000
7/25/2010	6:15:59 PM	H2 MFC set to  0.000000
7/25/2010	6:15:59 PM	BCl3 MFC set to  0.000000
7/25/2010	6:15:59 PM	PHl3 MFC set to  0.000000
7/25/2010	6:15:59 PM	SiCl4 MFC set to  0.000000
7/25/2010	6:15:59 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	6:15:59 PM	Tube furnace set to 0
7/25/2010	6:16:59 PM	H2 valve closed
7/25/2010	6:16:59 PM	BCl3 valve closed
7/25/2010	6:16:59 PM	PH3 valve closed
7/25/2010	6:16:59 PM	SiCl4 pre valve closed
7/25/2010	6:16:59 PM	SiCl4 post valve closed
7/25/2010	6:16:59 PM	Bubbler valve closed
7/25/2010	6:16:59 PM	Helium valve opened
7/25/2010	6:16:59 PM	Main Vac valve opened
7/25/2010	6:16:59 PM	Bypass valve opened
7/25/2010	6:16:59 PM	Helium MFC set to  100.000000
7/25/2010	6:16:59 PM	H2 MFC set to  0.000000
7/25/2010	6:16:59 PM	BCl3 MFC set to  0.000000
7/25/2010	6:16:59 PM	PHl3 MFC set to  0.000000
7/25/2010	6:16:59 PM	SiCl4 MFC set to  0.000000
7/25/2010	6:16:59 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	6:17:00 PM	Tube furnace set to 0
7/25/2010	6:26:00 PM	Helium valve closed
7/25/2010	6:26:00 PM	H2 valve closed
7/25/2010	6:26:00 PM	BCl3 valve closed
7/25/2010	6:26:00 PM	PH3 valve closed
7/25/2010	6:26:00 PM	SiCl4 pre valve closed
7/25/2010	6:26:00 PM	SiCl4 post valve closed
7/25/2010	6:26:00 PM	Bubbler valve closed
7/25/2010	6:26:00 PM	Main Vac valve opened
7/25/2010	6:26:00 PM	Bypass valve opened
7/25/2010	6:26:00 PM	Helium MFC set to  0.000000
7/25/2010	6:26:00 PM	H2 MFC set to  0.000000
7/25/2010	6:26:00 PM	BCl3 MFC set to  0.000000
7/25/2010	6:26:00 PM	PHl3 MFC set to  0.000000
7/25/2010	6:26:00 PM	SiCl4 MFC set to  0.000000
7/25/2010	6:26:00 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	6:26:00 PM	Tube furnace set to 0
7/25/2010	6:26:01 PM	Run finished at 6:26 PM
7/25/2010	6:36:37 PM	Recipe started at 6:36 PM
7/25/2010	6:36:37 PM	Helium valve closed
7/25/2010	6:36:37 PM	BCl3 valve closed
7/25/2010	6:36:37 PM	PH3 valve closed
7/25/2010	6:36:37 PM	SiCl4 pre valve closed
7/25/2010	6:36:37 PM	SiCl4 post valve closed
7/25/2010	6:36:37 PM	Main Vac valve closed
7/25/2010	6:36:37 PM	Bypass valve closed
7/25/2010	6:36:37 PM	Bubbler valve closed
7/25/2010	6:36:37 PM	H2 valve opened
7/25/2010	6:36:37 PM	Helium MFC set to  0.000000
7/25/2010	6:36:37 PM	H2 MFC set to  500.000000
7/25/2010	6:36:37 PM	BCl3 MFC set to  0.000000
7/25/2010	6:36:37 PM	PHl3 MFC set to  0.000000
7/25/2010	6:36:37 PM	SiCl4 MFC set to  0.000000
7/25/2010	6:36:37 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	6:36:37 PM	Tube furnace set to 0
7/25/2010	6:37:56 PM	Helium valve closed
7/25/2010	6:37:56 PM	BCl3 valve closed
7/25/2010	6:37:56 PM	PH3 valve closed
7/25/2010	6:37:56 PM	SiCl4 pre valve closed
7/25/2010	6:37:56 PM	SiCl4 post valve closed
7/25/2010	6:37:56 PM	Main Vac valve closed
7/25/2010	6:37:56 PM	Bypass valve closed
7/25/2010	6:37:56 PM	H2 valve opened
7/25/2010	6:37:56 PM	Bubbler valve opened
7/25/2010	6:37:56 PM	Helium MFC set to  0.000000
7/25/2010	6:37:56 PM	H2 MFC set to  500.000000
7/25/2010	6:37:56 PM	BCl3 MFC set to  0.000000
7/25/2010	6:37:56 PM	PHl3 MFC set to  0.000000
7/25/2010	6:37:56 PM	SiCl4 MFC set to  0.000000
7/25/2010	6:37:56 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	6:37:56 PM	Tube furnace set to 1000
7/25/2010	6:57:56 PM	Helium valve closed
7/25/2010	6:57:56 PM	PH3 valve closed
7/25/2010	6:57:56 PM	Main Vac valve closed
7/25/2010	6:57:56 PM	Bypass valve closed
7/25/2010	6:57:56 PM	H2 valve opened
7/25/2010	6:57:56 PM	BCl3 valve opened
7/25/2010	6:57:56 PM	SiCl4 pre valve opened
7/25/2010	6:57:56 PM	SiCl4 post valve opened
7/25/2010	6:57:56 PM	Bubbler valve opened
7/25/2010	6:57:56 PM	Helium MFC set to  0.000000
7/25/2010	6:57:56 PM	H2 MFC set to  500.000000
7/25/2010	6:57:56 PM	BCl3 MFC set to  6.000000
7/25/2010	6:57:56 PM	PHl3 MFC set to  0.000000
7/25/2010	6:57:56 PM	SiCl4 MFC set to  50.000000
7/25/2010	6:57:56 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	6:57:56 PM	Tube furnace set to 1000
7/25/2010	7:12:56 PM	H2 valve closed
7/25/2010	7:12:56 PM	BCl3 valve closed
7/25/2010	7:12:56 PM	PH3 valve closed
7/25/2010	7:12:56 PM	SiCl4 pre valve closed
7/25/2010	7:12:56 PM	SiCl4 post valve closed
7/25/2010	7:12:56 PM	Main Vac valve closed
7/25/2010	7:12:56 PM	Bypass valve closed
7/25/2010	7:12:56 PM	Helium valve opened
7/25/2010	7:12:56 PM	Bubbler valve opened
7/25/2010	7:12:56 PM	Helium MFC set to  500.000000
7/25/2010	7:12:56 PM	H2 MFC set to  0.000000
7/25/2010	7:12:56 PM	BCl3 MFC set to  0.000000
7/25/2010	7:12:56 PM	PHl3 MFC set to  0.000000
7/25/2010	7:12:56 PM	SiCl4 MFC set to  0.000000
7/25/2010	7:12:56 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	7:12:57 PM	Tube furnace set to 0
7/25/2010	7:32:57 PM	Helium valve closed
7/25/2010	7:32:57 PM	H2 valve closed
7/25/2010	7:32:57 PM	BCl3 valve closed
7/25/2010	7:32:57 PM	PH3 valve closed
7/25/2010	7:32:57 PM	SiCl4 pre valve closed
7/25/2010	7:32:57 PM	SiCl4 post valve closed
7/25/2010	7:32:57 PM	Main Vac valve closed
7/25/2010	7:32:57 PM	Bypass valve closed
7/25/2010	7:32:57 PM	Bubbler valve closed
7/25/2010	7:32:57 PM	Helium MFC set to  0.000000
7/25/2010	7:32:57 PM	H2 MFC set to  0.000000
7/25/2010	7:32:57 PM	BCl3 MFC set to  0.000000
7/25/2010	7:32:57 PM	PHl3 MFC set to  0.000000
7/25/2010	7:32:57 PM	SiCl4 MFC set to  0.000000
7/25/2010	7:32:57 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	7:32:57 PM	Tube furnace set to 0
7/25/2010	7:32:57 PM	Run finished at 7:32 PM
7/25/2010	7:33:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2010	7:33:29 PM	Recipe started at 7:33 PM
7/25/2010	7:33:29 PM	H2 valve closed
7/25/2010	7:33:29 PM	BCl3 valve closed
7/25/2010	7:33:29 PM	PH3 valve closed
7/25/2010	7:33:29 PM	SiCl4 pre valve closed
7/25/2010	7:33:29 PM	SiCl4 post valve closed
7/25/2010	7:33:29 PM	Main Vac valve closed
7/25/2010	7:33:29 PM	Bypass valve closed
7/25/2010	7:33:29 PM	Bubbler valve closed
7/25/2010	7:33:29 PM	Helium valve opened
7/25/2010	7:33:29 PM	Helium MFC set to  500.000000
7/25/2010	7:33:29 PM	H2 MFC set to  0.000000
7/25/2010	7:33:29 PM	BCl3 MFC set to  0.000000
7/25/2010	7:33:29 PM	PHl3 MFC set to  0.000000
7/25/2010	7:33:29 PM	SiCl4 MFC set to  0.000000
7/25/2010	7:33:29 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	7:33:29 PM	Tube furnace set to 0
7/25/2010	7:33:29 PM	Helium valve closed
7/25/2010	7:33:29 PM	H2 valve closed
7/25/2010	7:33:29 PM	BCl3 valve closed
7/25/2010	7:33:29 PM	PH3 valve closed
7/25/2010	7:33:29 PM	SiCl4 pre valve closed
7/25/2010	7:33:29 PM	SiCl4 post valve closed
7/25/2010	7:33:29 PM	Main Vac valve closed
7/25/2010	7:33:29 PM	Bypass valve closed
7/25/2010	7:33:29 PM	Bubbler valve closed
7/25/2010	7:33:29 PM	Helium MFC set to  0.000000
7/25/2010	7:33:29 PM	H2 MFC set to  0.000000
7/25/2010	7:33:29 PM	BCl3 MFC set to  0.000000
7/25/2010	7:33:29 PM	PHl3 MFC set to  0.000000
7/25/2010	7:33:29 PM	SiCl4 MFC set to  0.000000
7/25/2010	7:33:29 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	7:33:29 PM	Tube furnace set to 0
7/25/2010	7:33:30 PM	Run finished at 7:33 PM
7/25/2010	7:33:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/25/2010	7:39:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	7:39:37 PM	Recipe started at 7:39 PM
7/25/2010	7:39:37 PM	Helium valve closed
7/25/2010	7:39:37 PM	H2 valve closed
7/25/2010	7:39:37 PM	BCl3 valve closed
7/25/2010	7:39:37 PM	PH3 valve closed
7/25/2010	7:39:37 PM	SiCl4 pre valve closed
7/25/2010	7:39:37 PM	SiCl4 post valve closed
7/25/2010	7:39:37 PM	Main Vac valve closed
7/25/2010	7:39:37 PM	Bubbler valve closed
7/25/2010	7:39:37 PM	Bypass valve opened
7/25/2010	7:39:37 PM	Helium MFC set to  0.000000
7/25/2010	7:39:37 PM	H2 MFC set to  0.000000
7/25/2010	7:39:37 PM	BCl3 MFC set to  0.000000
7/25/2010	7:39:37 PM	PHl3 MFC set to  0.000000
7/25/2010	7:39:37 PM	SiCl4 MFC set to  0.000000
7/25/2010	7:39:37 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	7:39:37 PM	Tube furnace set to 0
7/25/2010	7:40:12 PM	Helium valve closed
7/25/2010	7:40:12 PM	H2 valve closed
7/25/2010	7:40:12 PM	BCl3 valve closed
7/25/2010	7:40:12 PM	PH3 valve closed
7/25/2010	7:40:12 PM	SiCl4 pre valve closed
7/25/2010	7:40:12 PM	SiCl4 post valve closed
7/25/2010	7:40:12 PM	Bubbler valve closed
7/25/2010	7:40:12 PM	Main Vac valve opened
7/25/2010	7:40:12 PM	Bypass valve opened
7/25/2010	7:40:12 PM	Helium MFC set to  0.000000
7/25/2010	7:40:12 PM	H2 MFC set to  0.000000
7/25/2010	7:40:12 PM	BCl3 MFC set to  0.000000
7/25/2010	7:40:12 PM	PHl3 MFC set to  0.000000
7/25/2010	7:40:12 PM	SiCl4 MFC set to  0.000000
7/25/2010	7:40:12 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	7:40:12 PM	Tube furnace set to 0
7/25/2010	7:40:13 PM	Run finished at 7:40 PM
7/25/2010	7:40:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	7:40:32 PM	Recipe started at 7:40 PM
7/25/2010	7:40:32 PM	Helium valve closed
7/25/2010	7:40:32 PM	H2 valve closed
7/25/2010	7:40:32 PM	BCl3 valve closed
7/25/2010	7:40:32 PM	PH3 valve closed
7/25/2010	7:40:32 PM	SiCl4 pre valve closed
7/25/2010	7:40:32 PM	SiCl4 post valve closed
7/25/2010	7:40:32 PM	Main Vac valve closed
7/25/2010	7:40:32 PM	Bubbler valve closed
7/25/2010	7:40:32 PM	Bypass valve opened
7/25/2010	7:40:32 PM	Helium MFC set to  0.000000
7/25/2010	7:40:32 PM	H2 MFC set to  0.000000
7/25/2010	7:40:32 PM	BCl3 MFC set to  0.000000
7/25/2010	7:40:32 PM	PHl3 MFC set to  0.000000
7/25/2010	7:40:32 PM	SiCl4 MFC set to  0.000000
7/25/2010	7:40:32 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	7:40:33 PM	Tube furnace set to 0
7/25/2010	7:40:33 PM	Helium valve closed
7/25/2010	7:40:33 PM	H2 valve closed
7/25/2010	7:40:33 PM	BCl3 valve closed
7/25/2010	7:40:33 PM	PH3 valve closed
7/25/2010	7:40:33 PM	SiCl4 pre valve closed
7/25/2010	7:40:33 PM	SiCl4 post valve closed
7/25/2010	7:40:33 PM	Bubbler valve closed
7/25/2010	7:40:33 PM	Main Vac valve opened
7/25/2010	7:40:33 PM	Bypass valve opened
7/25/2010	7:40:33 PM	Helium MFC set to  0.000000
7/25/2010	7:40:33 PM	H2 MFC set to  0.000000
7/25/2010	7:40:33 PM	BCl3 MFC set to  0.000000
7/25/2010	7:40:33 PM	PHl3 MFC set to  0.000000
7/25/2010	7:40:33 PM	SiCl4 MFC set to  0.000000
7/25/2010	7:40:33 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	7:40:33 PM	Tube furnace set to 0
7/25/2010	7:41:33 PM	H2 valve closed
7/25/2010	7:41:33 PM	BCl3 valve closed
7/25/2010	7:41:33 PM	PH3 valve closed
7/25/2010	7:41:33 PM	SiCl4 pre valve closed
7/25/2010	7:41:33 PM	SiCl4 post valve closed
7/25/2010	7:41:33 PM	Bubbler valve closed
7/25/2010	7:41:33 PM	Helium valve opened
7/25/2010	7:41:33 PM	Main Vac valve opened
7/25/2010	7:41:33 PM	Bypass valve opened
7/25/2010	7:41:33 PM	Helium MFC set to  100.000000
7/25/2010	7:41:33 PM	H2 MFC set to  0.000000
7/25/2010	7:41:33 PM	BCl3 MFC set to  0.000000
7/25/2010	7:41:33 PM	PHl3 MFC set to  0.000000
7/25/2010	7:41:33 PM	SiCl4 MFC set to  0.000000
7/25/2010	7:41:33 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	7:41:33 PM	Tube furnace set to 0
7/25/2010	7:50:33 PM	Helium valve closed
7/25/2010	7:50:33 PM	H2 valve closed
7/25/2010	7:50:33 PM	BCl3 valve closed
7/25/2010	7:50:33 PM	PH3 valve closed
7/25/2010	7:50:33 PM	SiCl4 pre valve closed
7/25/2010	7:50:33 PM	SiCl4 post valve closed
7/25/2010	7:50:33 PM	Bubbler valve closed
7/25/2010	7:50:33 PM	Main Vac valve opened
7/25/2010	7:50:33 PM	Bypass valve opened
7/25/2010	7:50:33 PM	Helium MFC set to  0.000000
7/25/2010	7:50:33 PM	H2 MFC set to  0.000000
7/25/2010	7:50:33 PM	BCl3 MFC set to  0.000000
7/25/2010	7:50:33 PM	PHl3 MFC set to  0.000000
7/25/2010	7:50:33 PM	SiCl4 MFC set to  0.000000
7/25/2010	7:50:33 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	7:50:33 PM	Tube furnace set to 0
7/25/2010	7:51:33 PM	H2 valve closed
7/25/2010	7:51:33 PM	BCl3 valve closed
7/25/2010	7:51:33 PM	PH3 valve closed
7/25/2010	7:51:33 PM	SiCl4 pre valve closed
7/25/2010	7:51:33 PM	SiCl4 post valve closed
7/25/2010	7:51:33 PM	Bubbler valve closed
7/25/2010	7:51:33 PM	Helium valve opened
7/25/2010	7:51:33 PM	Main Vac valve opened
7/25/2010	7:51:33 PM	Bypass valve opened
7/25/2010	7:51:33 PM	Helium MFC set to  100.000000
7/25/2010	7:51:33 PM	H2 MFC set to  0.000000
7/25/2010	7:51:33 PM	BCl3 MFC set to  0.000000
7/25/2010	7:51:33 PM	PHl3 MFC set to  0.000000
7/25/2010	7:51:33 PM	SiCl4 MFC set to  0.000000
7/25/2010	7:51:33 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	7:51:34 PM	Tube furnace set to 0
7/25/2010	8:00:34 PM	Helium valve closed
7/25/2010	8:00:34 PM	H2 valve closed
7/25/2010	8:00:34 PM	BCl3 valve closed
7/25/2010	8:00:34 PM	PH3 valve closed
7/25/2010	8:00:34 PM	SiCl4 pre valve closed
7/25/2010	8:00:34 PM	SiCl4 post valve closed
7/25/2010	8:00:34 PM	Bubbler valve closed
7/25/2010	8:00:34 PM	Main Vac valve opened
7/25/2010	8:00:34 PM	Bypass valve opened
7/25/2010	8:00:34 PM	Helium MFC set to  0.000000
7/25/2010	8:00:34 PM	H2 MFC set to  0.000000
7/25/2010	8:00:34 PM	BCl3 MFC set to  0.000000
7/25/2010	8:00:34 PM	PHl3 MFC set to  0.000000
7/25/2010	8:00:34 PM	SiCl4 MFC set to  0.000000
7/25/2010	8:00:34 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	8:00:34 PM	Tube furnace set to 0
7/25/2010	8:01:34 PM	H2 valve closed
7/25/2010	8:01:34 PM	BCl3 valve closed
7/25/2010	8:01:34 PM	PH3 valve closed
7/25/2010	8:01:34 PM	SiCl4 pre valve closed
7/25/2010	8:01:34 PM	SiCl4 post valve closed
7/25/2010	8:01:34 PM	Bubbler valve closed
7/25/2010	8:01:34 PM	Helium valve opened
7/25/2010	8:01:34 PM	Main Vac valve opened
7/25/2010	8:01:34 PM	Bypass valve opened
7/25/2010	8:01:34 PM	Helium MFC set to  100.000000
7/25/2010	8:01:34 PM	H2 MFC set to  0.000000
7/25/2010	8:01:34 PM	BCl3 MFC set to  0.000000
7/25/2010	8:01:34 PM	PHl3 MFC set to  0.000000
7/25/2010	8:01:34 PM	SiCl4 MFC set to  0.000000
7/25/2010	8:01:34 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	8:01:34 PM	Tube furnace set to 0
7/25/2010	8:10:34 PM	Helium valve closed
7/25/2010	8:10:34 PM	H2 valve closed
7/25/2010	8:10:34 PM	BCl3 valve closed
7/25/2010	8:10:34 PM	PH3 valve closed
7/25/2010	8:10:34 PM	SiCl4 pre valve closed
7/25/2010	8:10:34 PM	SiCl4 post valve closed
7/25/2010	8:10:34 PM	Bubbler valve closed
7/25/2010	8:10:34 PM	Main Vac valve opened
7/25/2010	8:10:34 PM	Bypass valve opened
7/25/2010	8:10:34 PM	Helium MFC set to  0.000000
7/25/2010	8:10:34 PM	H2 MFC set to  0.000000
7/25/2010	8:10:34 PM	BCl3 MFC set to  0.000000
7/25/2010	8:10:34 PM	PHl3 MFC set to  0.000000
7/25/2010	8:10:34 PM	SiCl4 MFC set to  0.000000
7/25/2010	8:10:34 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	8:10:34 PM	Tube furnace set to 0
7/25/2010	8:11:34 PM	H2 valve closed
7/25/2010	8:11:34 PM	BCl3 valve closed
7/25/2010	8:11:34 PM	PH3 valve closed
7/25/2010	8:11:34 PM	SiCl4 pre valve closed
7/25/2010	8:11:34 PM	SiCl4 post valve closed
7/25/2010	8:11:34 PM	Bubbler valve closed
7/25/2010	8:11:34 PM	Helium valve opened
7/25/2010	8:11:34 PM	Main Vac valve opened
7/25/2010	8:11:34 PM	Bypass valve opened
7/25/2010	8:11:34 PM	Helium MFC set to  100.000000
7/25/2010	8:11:34 PM	H2 MFC set to  0.000000
7/25/2010	8:11:34 PM	BCl3 MFC set to  0.000000
7/25/2010	8:11:34 PM	PHl3 MFC set to  0.000000
7/25/2010	8:11:34 PM	SiCl4 MFC set to  0.000000
7/25/2010	8:11:34 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	8:11:34 PM	Tube furnace set to 0
7/25/2010	8:20:34 PM	Helium valve closed
7/25/2010	8:20:34 PM	H2 valve closed
7/25/2010	8:20:34 PM	BCl3 valve closed
7/25/2010	8:20:34 PM	PH3 valve closed
7/25/2010	8:20:34 PM	SiCl4 pre valve closed
7/25/2010	8:20:34 PM	SiCl4 post valve closed
7/25/2010	8:20:34 PM	Bubbler valve closed
7/25/2010	8:20:34 PM	Main Vac valve opened
7/25/2010	8:20:34 PM	Bypass valve opened
7/25/2010	8:20:34 PM	Helium MFC set to  0.000000
7/25/2010	8:20:34 PM	H2 MFC set to  0.000000
7/25/2010	8:20:34 PM	BCl3 MFC set to  0.000000
7/25/2010	8:20:34 PM	PHl3 MFC set to  0.000000
7/25/2010	8:20:34 PM	SiCl4 MFC set to  0.000000
7/25/2010	8:20:34 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	8:20:35 PM	Tube furnace set to 0
7/25/2010	8:21:35 PM	H2 valve closed
7/25/2010	8:21:35 PM	BCl3 valve closed
7/25/2010	8:21:35 PM	PH3 valve closed
7/25/2010	8:21:35 PM	SiCl4 pre valve closed
7/25/2010	8:21:35 PM	SiCl4 post valve closed
7/25/2010	8:21:35 PM	Bubbler valve closed
7/25/2010	8:21:35 PM	Helium valve opened
7/25/2010	8:21:35 PM	Main Vac valve opened
7/25/2010	8:21:35 PM	Bypass valve opened
7/25/2010	8:21:35 PM	Helium MFC set to  100.000000
7/25/2010	8:21:35 PM	H2 MFC set to  0.000000
7/25/2010	8:21:35 PM	BCl3 MFC set to  0.000000
7/25/2010	8:21:35 PM	PHl3 MFC set to  0.000000
7/25/2010	8:21:35 PM	SiCl4 MFC set to  0.000000
7/25/2010	8:21:35 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	8:21:35 PM	Tube furnace set to 0
7/25/2010	8:30:35 PM	Helium valve closed
7/25/2010	8:30:35 PM	H2 valve closed
7/25/2010	8:30:35 PM	BCl3 valve closed
7/25/2010	8:30:35 PM	PH3 valve closed
7/25/2010	8:30:35 PM	SiCl4 pre valve closed
7/25/2010	8:30:35 PM	SiCl4 post valve closed
7/25/2010	8:30:35 PM	Bubbler valve closed
7/25/2010	8:30:35 PM	Main Vac valve opened
7/25/2010	8:30:35 PM	Bypass valve opened
7/25/2010	8:30:35 PM	Helium MFC set to  0.000000
7/25/2010	8:30:35 PM	H2 MFC set to  0.000000
7/25/2010	8:30:35 PM	BCl3 MFC set to  0.000000
7/25/2010	8:30:35 PM	PHl3 MFC set to  0.000000
7/25/2010	8:30:35 PM	SiCl4 MFC set to  0.000000
7/25/2010	8:30:35 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	8:30:35 PM	Tube furnace set to 0
7/25/2010	8:30:36 PM	Run finished at 8:30 PM
7/25/2010	9:01:48 PM	Recipe started at 9:01 PM
7/25/2010	9:01:48 PM	Helium valve closed
7/25/2010	9:01:48 PM	BCl3 valve closed
7/25/2010	9:01:48 PM	PH3 valve closed
7/25/2010	9:01:48 PM	SiCl4 pre valve closed
7/25/2010	9:01:48 PM	SiCl4 post valve closed
7/25/2010	9:01:48 PM	Main Vac valve closed
7/25/2010	9:01:48 PM	Bypass valve closed
7/25/2010	9:01:49 PM	Bubbler valve closed
7/25/2010	9:01:49 PM	H2 valve opened
7/25/2010	9:01:49 PM	Helium MFC set to  0.000000
7/25/2010	9:01:49 PM	H2 MFC set to  500.000000
7/25/2010	9:01:49 PM	BCl3 MFC set to  0.000000
7/25/2010	9:01:49 PM	PHl3 MFC set to  0.000000
7/25/2010	9:01:49 PM	SiCl4 MFC set to  0.000000
7/25/2010	9:01:49 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:01:49 PM	Tube furnace set to 0
7/25/2010	9:03:07 PM	Helium valve closed
7/25/2010	9:03:07 PM	BCl3 valve closed
7/25/2010	9:03:07 PM	PH3 valve closed
7/25/2010	9:03:07 PM	SiCl4 pre valve closed
7/25/2010	9:03:07 PM	SiCl4 post valve closed
7/25/2010	9:03:07 PM	Main Vac valve closed
7/25/2010	9:03:07 PM	Bypass valve closed
7/25/2010	9:03:07 PM	H2 valve opened
7/25/2010	9:03:07 PM	Bubbler valve opened
7/25/2010	9:03:07 PM	Helium MFC set to  0.000000
7/25/2010	9:03:07 PM	H2 MFC set to  500.000000
7/25/2010	9:03:07 PM	BCl3 MFC set to  0.000000
7/25/2010	9:03:07 PM	PHl3 MFC set to  0.000000
7/25/2010	9:03:07 PM	SiCl4 MFC set to  0.000000
7/25/2010	9:03:07 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:03:07 PM	Tube furnace set to 975
7/25/2010	9:23:07 PM	Helium valve closed
7/25/2010	9:23:07 PM	PH3 valve closed
7/25/2010	9:23:07 PM	Main Vac valve closed
7/25/2010	9:23:07 PM	Bypass valve closed
7/25/2010	9:23:07 PM	H2 valve opened
7/25/2010	9:23:07 PM	BCl3 valve opened
7/25/2010	9:23:07 PM	SiCl4 pre valve opened
7/25/2010	9:23:07 PM	SiCl4 post valve opened
7/25/2010	9:23:07 PM	Bubbler valve opened
7/25/2010	9:23:07 PM	Helium MFC set to  0.000000
7/25/2010	9:23:07 PM	H2 MFC set to  500.000000
7/25/2010	9:23:07 PM	BCl3 MFC set to  6.000000
7/25/2010	9:23:07 PM	PHl3 MFC set to  0.000000
7/25/2010	9:23:07 PM	SiCl4 MFC set to  50.000000
7/25/2010	9:23:07 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:23:08 PM	Tube furnace set to 975
7/25/2010	9:38:08 PM	H2 valve closed
7/25/2010	9:38:08 PM	BCl3 valve closed
7/25/2010	9:38:08 PM	PH3 valve closed
7/25/2010	9:38:08 PM	SiCl4 pre valve closed
7/25/2010	9:38:08 PM	SiCl4 post valve closed
7/25/2010	9:38:08 PM	Main Vac valve closed
7/25/2010	9:38:08 PM	Bypass valve closed
7/25/2010	9:38:08 PM	Helium valve opened
7/25/2010	9:38:08 PM	Bubbler valve opened
7/25/2010	9:38:08 PM	Helium MFC set to  500.000000
7/25/2010	9:38:08 PM	H2 MFC set to  0.000000
7/25/2010	9:38:08 PM	BCl3 MFC set to  0.000000
7/25/2010	9:38:08 PM	PHl3 MFC set to  0.000000
7/25/2010	9:38:08 PM	SiCl4 MFC set to  0.000000
7/25/2010	9:38:08 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:38:08 PM	Tube furnace set to 0
7/25/2010	9:58:08 PM	Helium valve closed
7/25/2010	9:58:08 PM	H2 valve closed
7/25/2010	9:58:08 PM	BCl3 valve closed
7/25/2010	9:58:08 PM	PH3 valve closed
7/25/2010	9:58:08 PM	SiCl4 pre valve closed
7/25/2010	9:58:08 PM	SiCl4 post valve closed
7/25/2010	9:58:08 PM	Main Vac valve closed
7/25/2010	9:58:08 PM	Bypass valve closed
7/25/2010	9:58:08 PM	Bubbler valve closed
7/25/2010	9:58:08 PM	Helium MFC set to  0.000000
7/25/2010	9:58:08 PM	H2 MFC set to  0.000000
7/25/2010	9:58:08 PM	BCl3 MFC set to  0.000000
7/25/2010	9:58:08 PM	PHl3 MFC set to  0.000000
7/25/2010	9:58:08 PM	SiCl4 MFC set to  0.000000
7/25/2010	9:58:08 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	9:58:08 PM	Tube furnace set to 0
7/25/2010	9:58:08 PM	Run finished at 9:58 PM
7/25/2010	10:16:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/25/2010	10:16:45 PM	Recipe started at 10:16 PM
7/25/2010	10:16:45 PM	Helium valve closed
7/25/2010	10:16:45 PM	H2 valve closed
7/25/2010	10:16:45 PM	BCl3 valve closed
7/25/2010	10:16:45 PM	PH3 valve closed
7/25/2010	10:16:45 PM	SiCl4 pre valve closed
7/25/2010	10:16:45 PM	SiCl4 post valve closed
7/25/2010	10:16:45 PM	Main Vac valve closed
7/25/2010	10:16:45 PM	Bubbler valve closed
7/25/2010	10:16:45 PM	Bypass valve opened
7/25/2010	10:16:45 PM	Helium MFC set to  0.000000
7/25/2010	10:16:45 PM	H2 MFC set to  0.000000
7/25/2010	10:16:45 PM	BCl3 MFC set to  0.000000
7/25/2010	10:16:45 PM	PHl3 MFC set to  0.000000
7/25/2010	10:16:45 PM	SiCl4 MFC set to  0.000000
7/25/2010	10:16:45 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	10:16:46 PM	Tube furnace set to 0
7/25/2010	10:17:21 PM	Helium valve closed
7/25/2010	10:17:21 PM	H2 valve closed
7/25/2010	10:17:21 PM	BCl3 valve closed
7/25/2010	10:17:21 PM	PH3 valve closed
7/25/2010	10:17:21 PM	SiCl4 pre valve closed
7/25/2010	10:17:21 PM	SiCl4 post valve closed
7/25/2010	10:17:21 PM	Bubbler valve closed
7/25/2010	10:17:21 PM	Main Vac valve opened
7/25/2010	10:17:21 PM	Bypass valve opened
7/25/2010	10:17:21 PM	Helium MFC set to  0.000000
7/25/2010	10:17:21 PM	H2 MFC set to  0.000000
7/25/2010	10:17:21 PM	BCl3 MFC set to  0.000000
7/25/2010	10:17:21 PM	PHl3 MFC set to  0.000000
7/25/2010	10:17:21 PM	SiCl4 MFC set to  0.000000
7/25/2010	10:17:21 PM	Bypass solenoid MFC set to  0.000000
7/25/2010	10:17:21 PM	Tube furnace set to 0
7/25/2010	10:17:22 PM	Run finished at 10:17 PM
7/25/2010	10:17:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
